JPS6339167U - - Google Patents

Info

Publication number
JPS6339167U
JPS6339167U JP13182686U JP13182686U JPS6339167U JP S6339167 U JPS6339167 U JP S6339167U JP 13182686 U JP13182686 U JP 13182686U JP 13182686 U JP13182686 U JP 13182686U JP S6339167 U JPS6339167 U JP S6339167U
Authority
JP
Japan
Prior art keywords
chemical reaction
workpiece
reaction gas
hollow shaft
reaction vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13182686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13182686U priority Critical patent/JPS6339167U/ja
Publication of JPS6339167U publication Critical patent/JPS6339167U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP13182686U 1986-08-28 1986-08-28 Pending JPS6339167U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13182686U JPS6339167U (US20030199744A1-20031023-C00003.png) 1986-08-28 1986-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13182686U JPS6339167U (US20030199744A1-20031023-C00003.png) 1986-08-28 1986-08-28

Publications (1)

Publication Number Publication Date
JPS6339167U true JPS6339167U (US20030199744A1-20031023-C00003.png) 1988-03-14

Family

ID=31030639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13182686U Pending JPS6339167U (US20030199744A1-20031023-C00003.png) 1986-08-28 1986-08-28

Country Status (1)

Country Link
JP (1) JPS6339167U (US20030199744A1-20031023-C00003.png)

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