JPS6339166U - - Google Patents

Info

Publication number
JPS6339166U
JPS6339166U JP13048086U JP13048086U JPS6339166U JP S6339166 U JPS6339166 U JP S6339166U JP 13048086 U JP13048086 U JP 13048086U JP 13048086 U JP13048086 U JP 13048086U JP S6339166 U JPS6339166 U JP S6339166U
Authority
JP
Japan
Prior art keywords
target
composite
sides
piece
composite target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13048086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13048086U priority Critical patent/JPS6339166U/ja
Publication of JPS6339166U publication Critical patent/JPS6339166U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13048086U 1986-08-27 1986-08-27 Pending JPS6339166U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13048086U JPS6339166U (US07534539-20090519-C00280.png) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13048086U JPS6339166U (US07534539-20090519-C00280.png) 1986-08-27 1986-08-27

Publications (1)

Publication Number Publication Date
JPS6339166U true JPS6339166U (US07534539-20090519-C00280.png) 1988-03-14

Family

ID=31028019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13048086U Pending JPS6339166U (US07534539-20090519-C00280.png) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPS6339166U (US07534539-20090519-C00280.png)

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