JPS6339162U - - Google Patents

Info

Publication number

JPS6339162U

JPS6339162U JP12984886U JP12984886U JPS6339162U JP S6339162 U JPS6339162 U JP S6339162U JP 12984886 U JP12984886 U JP 12984886U JP 12984886 U JP12984886 U JP 12984886U JP S6339162 U JPS6339162 U JP S6339162U

Authority

JP

Japan

Prior art keywords

vacuum evaporation

surface analysis

conductive

coating

incorporated

Prior art date

1986-08-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007738 vacuum evaporation Methods 0.000 claims description 3
• 238000005211 surface analysis Methods 0.000 claims 2
• 239000011248 coating agent Substances 0.000 claims 1
• 238000000576 coating method Methods 0.000 claims 1
• 239000000126 substance Substances 0.000 claims 1
• 239000004020 conductor Substances 0.000 description 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
• 229910052721 tungsten Inorganic materials 0.000 description 1
• 239000010937 tungsten Substances 0.000 description 1