JPS6338321U - - Google Patents

Info

Publication number
JPS6338321U
JPS6338321U JP13122386U JP13122386U JPS6338321U JP S6338321 U JPS6338321 U JP S6338321U JP 13122386 U JP13122386 U JP 13122386U JP 13122386 U JP13122386 U JP 13122386U JP S6338321 U JPS6338321 U JP S6338321U
Authority
JP
Japan
Prior art keywords
support
support rod
substrate
pair
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13122386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13122386U priority Critical patent/JPS6338321U/ja
Publication of JPS6338321U publication Critical patent/JPS6338321U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP13122386U 1986-08-29 1986-08-29 Pending JPS6338321U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13122386U JPS6338321U (US07534539-20090519-C00280.png) 1986-08-29 1986-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13122386U JPS6338321U (US07534539-20090519-C00280.png) 1986-08-29 1986-08-29

Publications (1)

Publication Number Publication Date
JPS6338321U true JPS6338321U (US07534539-20090519-C00280.png) 1988-03-11

Family

ID=31029471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13122386U Pending JPS6338321U (US07534539-20090519-C00280.png) 1986-08-29 1986-08-29

Country Status (1)

Country Link
JP (1) JPS6338321U (US07534539-20090519-C00280.png)

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