JPS6336923U - - Google Patents

Info

Publication number

JPS6336923U

JPS6336923U JP13038386U JP13038386U JPS6336923U JP S6336923 U JPS6336923 U JP S6336923U JP 13038386 U JP13038386 U JP 13038386U JP 13038386 U JP13038386 U JP 13038386U JP S6336923 U JPS6336923 U JP S6336923U

Authority

JP

Japan

Prior art keywords

laser light

light source

laser

semiconductor substrate

diffraction grating

Prior art date

1986-08-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000003287 optical effect Effects 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• 238000010586 diagram Methods 0.000 description 1