JPS6336042U - - Google Patents

Info

Publication number
JPS6336042U
JPS6336042U JP12714586U JP12714586U JPS6336042U JP S6336042 U JPS6336042 U JP S6336042U JP 12714586 U JP12714586 U JP 12714586U JP 12714586 U JP12714586 U JP 12714586U JP S6336042 U JPS6336042 U JP S6336042U
Authority
JP
Japan
Prior art keywords
mounting table
wafer mounting
supporting substrate
opening
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12714586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12714586U priority Critical patent/JPS6336042U/ja
Publication of JPS6336042U publication Critical patent/JPS6336042U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
JP12714586U 1986-08-22 1986-08-22 Pending JPS6336042U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12714586U JPS6336042U (US07534539-20090519-C00280.png) 1986-08-22 1986-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12714586U JPS6336042U (US07534539-20090519-C00280.png) 1986-08-22 1986-08-22

Publications (1)

Publication Number Publication Date
JPS6336042U true JPS6336042U (US07534539-20090519-C00280.png) 1988-03-08

Family

ID=31021616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12714586U Pending JPS6336042U (US07534539-20090519-C00280.png) 1986-08-22 1986-08-22

Country Status (1)

Country Link
JP (1) JPS6336042U (US07534539-20090519-C00280.png)

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