JPS6333631U - - Google Patents

Info

Publication number
JPS6333631U
JPS6333631U JP12656886U JP12656886U JPS6333631U JP S6333631 U JPS6333631 U JP S6333631U JP 12656886 U JP12656886 U JP 12656886U JP 12656886 U JP12656886 U JP 12656886U JP S6333631 U JPS6333631 U JP S6333631U
Authority
JP
Japan
Prior art keywords
chuck
recess
wafer
circumferential groove
suction means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12656886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12656886U priority Critical patent/JPS6333631U/ja
Publication of JPS6333631U publication Critical patent/JPS6333631U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP12656886U 1986-08-21 1986-08-21 Pending JPS6333631U (US06566495-20030520-M00011.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12656886U JPS6333631U (US06566495-20030520-M00011.png) 1986-08-21 1986-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12656886U JPS6333631U (US06566495-20030520-M00011.png) 1986-08-21 1986-08-21

Publications (1)

Publication Number Publication Date
JPS6333631U true JPS6333631U (US06566495-20030520-M00011.png) 1988-03-04

Family

ID=31020493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12656886U Pending JPS6333631U (US06566495-20030520-M00011.png) 1986-08-21 1986-08-21

Country Status (1)

Country Link
JP (1) JPS6333631U (US06566495-20030520-M00011.png)

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