JPS6333627U - - Google Patents

Info

Publication number

JPS6333627U

JPS6333627U JP12688786U JP12688786U JPS6333627U JP S6333627 U JPS6333627 U JP S6333627U JP 12688786 U JP12688786 U JP 12688786U JP 12688786 U JP12688786 U JP 12688786U JP S6333627 U JPS6333627 U JP S6333627U

Authority

JP

Japan

Prior art keywords

wafer

back side

nozzle

dry

holding plate

Prior art date

1986-08-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 4
• 239000007788 liquid Substances 0.000 claims description 2
• 239000007921 spray Substances 0.000 claims description 2
• 238000005507 spraying Methods 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
• 238000002347 injection Methods 0.000 description 1
• 239000007924 injection Substances 0.000 description 1
• 238000012856 packing Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
• 229920002554 vinyl polymer Polymers 0.000 description 1