JPS6333624U - - Google Patents

Info

Publication number

JPS6333624U

JPS6333624U JP12688886U JP12688886U JPS6333624U JP S6333624 U JPS6333624 U JP S6333624U JP 12688886 U JP12688886 U JP 12688886U JP 12688886 U JP12688886 U JP 12688886U JP S6333624 U JPS6333624 U JP S6333624U

Authority

JP

Japan

Prior art keywords

quartz boat

heat treatment

protective film

polycrystalline silicon

utility

Prior art date

1986-08-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000010453 quartz Substances 0.000 claims description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
• 238000010438 heat treatment Methods 0.000 claims description 2
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
• 230000001681 protective effect Effects 0.000 claims description 2
• 238000004519 manufacturing process Methods 0.000 claims 1

Cited By (1)