JPS6332392Y2 - - Google Patents

Info

Publication number
JPS6332392Y2
JPS6332392Y2 JP1983169907U JP16990783U JPS6332392Y2 JP S6332392 Y2 JPS6332392 Y2 JP S6332392Y2 JP 1983169907 U JP1983169907 U JP 1983169907U JP 16990783 U JP16990783 U JP 16990783U JP S6332392 Y2 JPS6332392 Y2 JP S6332392Y2
Authority
JP
Japan
Prior art keywords
bearing
bearing housing
heat transfer
housing
transfer fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983169907U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6077794U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16990783U priority Critical patent/JPS6077794U/ja
Publication of JPS6077794U publication Critical patent/JPS6077794U/ja
Application granted granted Critical
Publication of JPS6332392Y2 publication Critical patent/JPS6332392Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP16990783U 1983-10-31 1983-10-31 タ−ボ分子ポンプ Granted JPS6077794U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16990783U JPS6077794U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16990783U JPS6077794U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6077794U JPS6077794U (ja) 1985-05-30
JPS6332392Y2 true JPS6332392Y2 (enrdf_load_stackoverflow) 1988-08-29

Family

ID=30371062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16990783U Granted JPS6077794U (ja) 1983-10-31 1983-10-31 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6077794U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001243A1 (ja) * 2004-06-25 2006-01-05 Osaka Vacuum, Ltd. ターボ分子ポンプの軸受支持構造

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH622291A5 (enrdf_load_stackoverflow) * 1976-09-09 1981-03-31 Rieter Ag Maschf
JPS5395935U (enrdf_load_stackoverflow) * 1977-01-07 1978-08-04

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006001243A1 (ja) * 2004-06-25 2006-01-05 Osaka Vacuum, Ltd. ターボ分子ポンプの軸受支持構造
CN100432446C (zh) * 2004-06-25 2008-11-12 株式会社大阪真空机器制作所 涡轮分子泵的轴承支承结构
JP4703565B2 (ja) * 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 ターボ分子ポンプの軸受支持構造

Also Published As

Publication number Publication date
JPS6077794U (ja) 1985-05-30

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