JPS63314889A - Manufacture of porcelain wiring substrate - Google Patents
Manufacture of porcelain wiring substrateInfo
- Publication number
- JPS63314889A JPS63314889A JP15086287A JP15086287A JPS63314889A JP S63314889 A JPS63314889 A JP S63314889A JP 15086287 A JP15086287 A JP 15086287A JP 15086287 A JP15086287 A JP 15086287A JP S63314889 A JPS63314889 A JP S63314889A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- unit
- charged
- unsintered
- brush
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 229910052573 porcelain Inorganic materials 0.000 title abstract description 11
- 238000005245 sintering Methods 0.000 claims abstract description 4
- 239000000919 ceramic Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 18
- 239000000126 substance Substances 0.000 claims description 9
- 239000005416 organic matter Substances 0.000 claims description 6
- 150000002736 metal compounds Chemical class 0.000 claims description 5
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 239000011368 organic material Substances 0.000 abstract 3
- 108091008695 photoreceptors Proteins 0.000 description 18
- 238000007639 printing Methods 0.000 description 12
- 238000007650 screen-printing Methods 0.000 description 10
- 239000000203 mixture Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 241000282326 Felis catus Species 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
【発明の詳細な説明】
[発明の目的]
(産業上の利用分野)
本発明は、例えば多層磁器配線基板、積層磁器コンデン
サ等に用いられる磁器配線基板の製造方法に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a method of manufacturing a ceramic wiring board used for, for example, a multilayer ceramic wiring board, a laminated ceramic capacitor, and the like.
(従来の技術)
従来、磁器配線基板は、まず磁器組成物原料と有機バイ
ンダとを混合したものをドクターブレード法等により例
えばポリエステルフィルム上で成形することにより未焼
結磁器基板いわゆるグリーンシートを得、さらに電極材
料と抵抗体材料と有機バインダを混合したものをスクリ
ーン印刷法にて前記未焼結磁器基板上に塗布し、積層、
圧着後、所定の形状に切断し、焼結することで製作して
いた。(Prior Art) Conventionally, a ceramic wiring board is produced by first forming a mixture of a ceramic composition raw material and an organic binder onto a polyester film using a doctor blade method or the like to obtain an unsintered ceramic substrate called a green sheet. Further, a mixture of an electrode material, a resistor material, and an organic binder is coated on the unsintered ceramic substrate by screen printing, and laminated.
After crimping, it was cut into a predetermined shape and sintered.
(発明が解決しようとする問題点) 上記方法によって未焼結磁器基板上に電極。(Problem to be solved by the invention) Electrode on an unsintered porcelain substrate by the above method.
抵抗体等を形成するには、スクリーン印刷法を用いる必
要があり、これには印刷形状に合わせた製版を予め用意
しておく必要がある。このため、従来は、少量生産時あ
るいはカスタム生産時においてコスト上昇を余儀なくさ
れ、また、納期が長くなる等の不都合を生じていた。更
に、印刷方法によるばらつきが大きく、条件を厳しく管
理する必要があった。In order to form resistors and the like, it is necessary to use a screen printing method, and for this it is necessary to prepare in advance a plate that matches the printing shape. For this reason, in the past, costs have been forced to increase during small-volume production or custom production, and there have been other inconveniences such as longer delivery times. Furthermore, there are large variations depending on the printing method, and it is necessary to strictly control the conditions.
そこで本発明は、上記の欠点を除去するもので、その目
的とするのは、品質が高く、しかも安価なる磁器配線基
板を得ることができる製造方法を提供することにおる。SUMMARY OF THE INVENTION The present invention aims to eliminate the above-mentioned drawbacks, and its purpose is to provide a manufacturing method capable of producing a ceramic wiring board of high quality and low cost.
[発明の構成コ
(問題点を解決するための手段)
本発明は、コロナ帯電させた未焼結磁器基板の表面に、
金属化合物を含有し且つ該未焼結磁器基板表面の電荷と
逆極性の電荷が帯電された有機物を所定の形状に転写し
、それを定着させた債、該未焼結磁器基板を焼結すると
共に該有機物を焼失させることを特徴とするものである
。[Configuration of the Invention (Means for Solving the Problems)] The present invention provides a method in which the surface of a corona-charged unsintered porcelain substrate is
Transferring an organic substance containing a metal compound and charged with a charge of opposite polarity to the surface charge of the unsintered porcelain substrate into a predetermined shape, fixing the bond, and sintering the unsintered porcelain substrate. At the same time, the organic matter is burned away.
(作 用)
上記の製造方法によれば、磁器基板の焼成温度において
有機物が焼失され、磁器基板の表面又は内部に金属化合
物による電極、抵抗体等を形成することができ、磁器配
線基板の製造コスト低下及び品質向上を図ることができ
る。(Function) According to the above manufacturing method, organic matter is burned out at the firing temperature of the ceramic substrate, and electrodes, resistors, etc. made of metal compounds can be formed on the surface or inside of the ceramic substrate, and the ceramic wiring board can be manufactured. It is possible to reduce costs and improve quality.
(実施例) 以下、本発明を実施例により具体的に説明する。(Example) Hereinafter, the present invention will be specifically explained with reference to Examples.
第1図乃至第7図は本発明の一実施例を示すものでおる
。1 to 7 show one embodiment of the present invention.
先ず、暗所にて、第1図に示すようにAJ2(アルミニ
ウム)より成る導電層1を設けたドラム状感光体(以下
、「感光体」という)2の表面に帯電ブラシ3を接触さ
せ、この帯電ブラシ3と導電層1との間に、直流電源4
よりの直流電圧を印加する(ステップ31)。接地側(
導電層1)を正極とし、ブラシ3側を負極とする。また
前記感光体2には光半導体(α−3i )を適用する。First, in a dark place, as shown in FIG. 1, a charging brush 3 is brought into contact with the surface of a drum-shaped photoreceptor (hereinafter referred to as "photoreceptor") 2 provided with a conductive layer 1 made of AJ2 (aluminum). A DC power source 4 is provided between the charging brush 3 and the conductive layer 1.
A higher DC voltage is applied (step 31). Ground side (
The conductive layer 1) is used as a positive electrode, and the brush 3 side is used as a negative electrode. Further, an optical semiconductor (α-3i) is applied to the photoreceptor 2.
このようにして感光体2を図示矢印方向に回転させると
、感光体2の表面はマイナスにコロナ帯電される。When the photoreceptor 2 is thus rotated in the direction of the arrow shown in the figure, the surface of the photoreceptor 2 is negatively charged with corona.
次に、感光体2の表面に螢光灯光を照射する(ステップ
32)。このとき、第2図に示すように螢光灯5と感光
体2との間に液晶シャッタ7を介在させ、この液晶シャ
ッタ7により、磁器配線基板における所望の電極形成箇
所に対応する部分に螢光灯光6が当たらないように感光
体2の光学的マスキングを行う。液晶シャッタ7の黒化
制御は、図示していない制御手段によって電気的に行わ
れる。螢光灯光が照射された部分(8で示す)は、光半
導体たるα−3iの性質により絶縁性がら導電性に変わ
り、それまで表面に帯電していた電荷が失われる。前記
光学的マスキングにより螢光灯光が当たらなかった部分
(9で示す)は絶縁性を維持しており、電荷は失われな
い。これを静電潜像という。Next, the surface of the photoreceptor 2 is irradiated with fluorescent light (step 32). At this time, as shown in FIG. 2, a liquid crystal shutter 7 is interposed between the fluorescent lamp 5 and the photoreceptor 2, and this liquid crystal shutter 7 allows the fluorescent light to be applied to a portion of the ceramic wiring board corresponding to the desired electrode formation location. The photoreceptor 2 is optically masked so that the lamp light 6 does not hit it. The blackening control of the liquid crystal shutter 7 is electrically performed by a control means (not shown). The portion irradiated with the fluorescent lamp light (indicated by 8) changes from insulating to conductive due to the properties of α-3i, which is a photosemiconductor, and the charge previously charged on the surface is lost. The portion (indicated by 9) that is not exposed to the fluorescent lamp light due to the optical masking maintains insulation and does not lose charge. This is called an electrostatic latent image.
次に、第3図に示すように、PdO(M化パラジュウム
)を有し且つ予め正に帯電させた有機物10を、回転す
る感光体2の表面に撮りかけ、前記静電潜像を現像する
(ステップS3)。Next, as shown in FIG. 3, an organic substance 10 containing PdO (palladium M) and positively charged in advance is photographed on the surface of the rotating photoreceptor 2, and the electrostatic latent image is developed. (Step S3).
一方、BaT!03 (誘電体)原料と有機バイブとを
混合したものをドクターブレード法によりシート状に成
形し、これを未焼結磁器基板として準備しておく。On the other hand, BaT! 03 (Dielectric) A mixture of raw materials and an organic vibrator is formed into a sheet by a doctor blade method, and this is prepared as an unsintered ceramic substrate.
そして、第4図に示づようにこの未焼結磁器基板11を
前記感光体2(静電潜像が現像されたもの)の表面に当
接させると共に感光体2の回転に、応じて矢印12方向
に移動させる。このとき帯電ブラシ30を介して電源4
0よりの負電位を未焼結磁器基板11に印加することで
負のコロナ放電を行い、感光体2の表面の有機物(現像
に供されたもの)を未焼結磁器基板11に転写する(ス
テップ34)。この転写を終了した後でも感光体20表
面上には未だ有機物及び残留電荷が存在する。Then, as shown in FIG. 4, this unsintered porcelain substrate 11 is brought into contact with the surface of the photoreceptor 2 (on which the electrostatic latent image has been developed), and as the photoreceptor 2 rotates, Move in 12 directions. At this time, the power source 4 is connected via the charging brush 30.
By applying a negative potential of 0 to the unsintered ceramic substrate 11, a negative corona discharge is performed, and the organic matter (subjected to development) on the surface of the photoreceptor 2 is transferred to the unsintered ceramic substrate 11 ( Step 34). Even after this transfer is completed, organic substances and residual charges still exist on the surface of the photoreceptor 20.
そこで、第5図に示すように回転する感光体2の表面を
螢光灯50よりの螢光灯光で照射することで除電し、ブ
ラシ13により清掃する。そして前記ステップS1に戻
る。Therefore, as shown in FIG. 5, the surface of the rotating photoreceptor 2 is irradiated with fluorescent light from a fluorescent lamp 50 to eliminate static electricity, and then cleaned with a brush 13. Then, the process returns to step S1.
次に、第6図に示すように、前記ステップS4により転
写が行われた未焼結磁器基板11をローラ15によって
矢印17方向に搬送すると共に、基板表面温度が120
℃程度となるように赤外線ヒータ14で加熱する(ステ
ップS5)。この加熱により未焼結磁器基板11上の有
機物が定着される。これを未焼結磁器配線基板と称する
。Next, as shown in FIG. 6, the unsintered porcelain substrate 11 on which the transfer was performed in step S4 is conveyed by the roller 15 in the direction of the arrow 17, and the substrate surface temperature is lowered to 120.
It is heated by the infrared heater 14 to about 0.degree. C. (step S5). This heating fixes the organic matter on the unsintered ceramic substrate 11. This is called an unsintered porcelain wiring board.
特に複数の磁器配線基板を用いて積層コンデンサを製造
する場合には、前記ステップS5までの工程によってj
qられた未焼結磁器配線基板を例えば50枚積層し、1
20℃、 100に3/catにて熱圧着した後、所
定の形状に切断しくステップ36)、そしてこれを炉内
温度1350℃の電気焼成炉にて2時間連理する(ステ
ップ37)。その後、第7図に示すようにAg(銀)に
有機バインダを混合したものを、積層された未焼結磁器
配線基板群18の両端部に塗布し端部電極19a、19
bを形成する。この端部電極形成は、例えばスクリーン
印刷法で行うことができる。第7図において、20で示
すのはPdOによる内部電極であり、21で示すのは誘
電体(Ba T! 03 )である。そしてそれを12
0℃雰囲気中で乾燥した後、800℃で焼結することで
積層コンデンサが得られる(ステップ39)。In particular, when manufacturing a multilayer capacitor using a plurality of ceramic wiring boards, j
For example, 50 unsintered porcelain wiring boards are stacked and 1
After thermocompression bonding at 20° C. and 100:3/cat, it is cut into a predetermined shape (step 36), and then baked in an electric firing furnace with an internal temperature of 1350° C. for 2 hours (step 37). Thereafter, as shown in FIG. 7, a mixture of Ag (silver) and an organic binder is applied to both ends of the stacked unsintered ceramic wiring board group 18, and the end electrodes 19a, 19 are coated with a mixture of Ag (silver) and an organic binder.
form b. This end electrode formation can be performed, for example, by a screen printing method. In FIG. 7, reference numeral 20 indicates an internal electrode made of PdO, and reference numeral 21 indicates a dielectric material (Ba T! 03 ). and make it 12
After drying in an atmosphere of 0°C, a multilayer capacitor is obtained by sintering at 800°C (step 39).
ここで、磁器配線基板の従来の製造方法において用いら
れていたスクリーン印刷法と、本実施例における静電定
着印刷法とを比較すると次のようになる。Here, a comparison is made between the screen printing method used in the conventional manufacturing method of a ceramic wiring board and the electrostatic fixing printing method in this embodiment.
先ず、スクリーン印刷法では印刷したいパターンを金属
枠にテトロン繊維を張って固定させ、その上に光学的方
法にて版膜を作って必要な画線以外の目をふさぐことに
なるが、静電定着印刷法では、予め設定されたプログラ
ムに従って液晶シャッタ7を制御することで容易に行う
ことができる。First, in the screen printing method, the pattern to be printed is fixed by stretching Tetoron fibers onto a metal frame, and then a plate film is created using an optical method on top of the pattern to cover the areas other than the necessary image lines. The fixed printing method can be easily carried out by controlling the liquid crystal shutter 7 according to a preset program.
また、スクリーン印刷法では製版を印刷機に取り付ける
必要があるが、静電定着印刷法ではこのような取り付は
工程は不要となる。Furthermore, while the screen printing method requires the plate to be attached to the printing machine, the electrostatic fixing printing method does not require such an attachment step.
次にスクリーン印刷法では枠内にインクを入れ、ヘラ状
のゴム板でスクリーンの内面を加圧I′Ij動すること
でインクをスクリーン外面側に通過させ、この通過イン
ク、で印刷が行われるが、静電定着印刷法ではこのよう
な作業は不要で前記ステップ4より明らかなように負の
コロナ放電によって行われる。Next, in the screen printing method, ink is poured into a frame, and a spatula-shaped rubber plate is pressed against the inner surface of the screen to allow the ink to pass to the outer surface of the screen, and printing is performed with this passing ink. However, in the electrostatic fixing printing method, such an operation is not necessary and, as is clear from step 4, it is performed by negative corona discharge.
また、スクリーン印刷法では版の交換及びインクの粘度
調整が必要となるが、静電定着印刷法ではこれらは不要
となる。Furthermore, while screen printing requires plate replacement and ink viscosity adjustment, electrostatic fixing printing does not require these.
更に、スクリーン印刷法では印刷復に溶剤を除くため通
常的120℃にて乾燥する必要があるが、静電定着印刷
法では定着に約120℃の熱処理を要するものの、溶剤
を使用していないため(インクではなく金属化合物と有
機物とを混合した粉末状のものを使用している)、乾燥
不要となる。Furthermore, screen printing requires drying at a temperature of 120°C to remove the solvent after printing, whereas electrostatic printing requires heat treatment at approximately 120°C for fixing, but does not use solvents. (Rather than ink, a powder mixture of metal compounds and organic substances is used.) No drying is required.
このように本実施例においては、静電定着印刷法を用い
て磁器配線基板を作成するようにしており、磁器基板の
焼成温度において有機物を焼失させ、磁器基板の表面又
は内部に金属化合物による電極、抵抗体等を形成するこ
とができ、例えば少量生産時あるいはカスタム生産時に
おいてもコスト上昇を押えることができ、所望の磁器配
線基板を安価に製造することができる。又、スクリーン
印刷法を用いた場合のように製品のばらつきが大きくな
いため、製品の品質が高くなる。As described above, in this example, a ceramic wiring board is created using the electrostatic fixing printing method, and the organic matter is burned off at the firing temperature of the ceramic board, and electrodes made of metal compounds are formed on the surface or inside of the ceramic board. , resistors, etc. can be formed, and for example, cost increases can be suppressed even during small-volume production or custom production, and desired ceramic wiring boards can be manufactured at low cost. In addition, the quality of the product is high because there is no large variation in the product unlike when screen printing is used.
尚、上記実施例では積層コンデンサを得る場合について
説明したが、本発明に係る製造方法によって得られる磁
器配線基板を複数枚積層することで多層磁器基板を1q
ることもできる。In the above embodiment, a case was explained in which a multilayer capacitor was obtained, but by laminating a plurality of ceramic wiring boards obtained by the manufacturing method according to the present invention, a multilayer ceramic board of 1 q.
You can also
以上本発明の一実施例について説明したが、本発明は上
記実施例に限定されるものではなく、種々の変形実施が
可能でおるのは言うまでもない。Although one embodiment of the present invention has been described above, it goes without saying that the present invention is not limited to the above embodiment, and that various modifications can be made.
[発明の効果]
以上詳述したように本発明によれば、品質の向上及び低
価格化を容易に達成し得る、磁器配線基板の製造方法を
提供することができる。[Effects of the Invention] As detailed above, according to the present invention, it is possible to provide a method for manufacturing a ceramic wiring board that can easily improve quality and reduce costs.
第1図乃至第7図は本発明一実施例を示ずもので、第1
図は感光体表面のコロナ帯電の説明図、第2図は感光体
表面への螢光灯光照射の説明図、第3図は静電潜像の現
像説明図、第4図は現像された静電潜像の転写の説明図
、第5図は感光体表面の有機物及び残留電荷の除去の説
明図、第6図は有機物定着の説明図、第7図は積層コン
デンサの端部電極形成の説明図である。
2・・・感光体、 10・・・有機物、11
・・・未焼結磁器基板。
第7因1 to 7 do not show one embodiment of the present invention.
Figure 2 is an illustration of corona charging on the surface of a photoreceptor, Figure 2 is an illustration of irradiation of fluorescent light onto the surface of the photoreceptor, Figure 3 is an illustration of development of an electrostatic latent image, and Figure 4 is an illustration of the developed electrostatic latent image. An explanatory diagram of the transfer of an electrostatic latent image, Fig. 5 is an explanatory diagram of the removal of organic substances and residual charges on the surface of the photoreceptor, Fig. 6 is an explanatory diagram of the fixation of organic substances, and Fig. 7 is an explanatory diagram of the formation of end electrodes of a multilayer capacitor. It is a diagram. 2...Photoreceptor, 10...Organic substance, 11
...Unsintered porcelain substrate. Seventh cause
Claims (1)
を含有し且つ該未焼結磁器基板表面の電荷と逆極性の電
荷が帯電された有機物を所定の形状に転写し、それを定
着させた後、該未焼結磁器基板を焼結すると共に該有機
物を焼失させることを特徴とする、磁器配線基板の製造
方法。An organic substance containing a metal compound and charged with a charge of opposite polarity to the surface of the unsintered ceramic substrate is transferred to a predetermined shape on the surface of the corona-charged unsintered ceramic substrate, and the organic substance is fixed. 1. A method for manufacturing a ceramic wiring board, comprising: sintering the unsintered ceramic substrate and burning out the organic matter.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15086287A JPS63314889A (en) | 1987-06-17 | 1987-06-17 | Manufacture of porcelain wiring substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15086287A JPS63314889A (en) | 1987-06-17 | 1987-06-17 | Manufacture of porcelain wiring substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63314889A true JPS63314889A (en) | 1988-12-22 |
Family
ID=15506005
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15086287A Pending JPS63314889A (en) | 1987-06-17 | 1987-06-17 | Manufacture of porcelain wiring substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63314889A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19980023354A (en) * | 1996-09-30 | 1998-07-06 | 엄길용 | Fluorescence layer formation method of flat panel display device |
US6577489B1 (en) | 1997-04-18 | 2003-06-10 | Koenig & Bauer Aktiengesellschaft | Device for electrostatic charging of a multilayer paper web |
-
1987
- 1987-06-17 JP JP15086287A patent/JPS63314889A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19980023354A (en) * | 1996-09-30 | 1998-07-06 | 엄길용 | Fluorescence layer formation method of flat panel display device |
US6577489B1 (en) | 1997-04-18 | 2003-06-10 | Koenig & Bauer Aktiengesellschaft | Device for electrostatic charging of a multilayer paper web |
US6822844B2 (en) | 1997-04-18 | 2004-11-23 | Koenig & Bauer Aktiengesellschaft | Device for electrostatic charging of a multilayer paper web |
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