JPS6328861A - Surface treatment device - Google Patents

Surface treatment device

Info

Publication number
JPS6328861A
JPS6328861A JP17143286A JP17143286A JPS6328861A JP S6328861 A JPS6328861 A JP S6328861A JP 17143286 A JP17143286 A JP 17143286A JP 17143286 A JP17143286 A JP 17143286A JP S6328861 A JPS6328861 A JP S6328861A
Authority
JP
Japan
Prior art keywords
substrate
holder
bias voltage
treated surface
electrification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17143286A
Other languages
Japanese (ja)
Other versions
JPH0774442B2 (en
Inventor
Kiyoshi Ogata
Yasunori Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP17143286A priority Critical patent/JPH0774442B2/en
Publication of JPS6328861A publication Critical patent/JPS6328861A/en
Publication of JPH0774442B2 publication Critical patent/JPH0774442B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE: To suppress the electrification on a substrate surface by providing a means for impressing a bias voltage to a substrate on a holder or the holder.
CONSTITUTION: An evaporating source 14 and a film thickness monitor 18 are provided in a vacuum vessel 2. A bias power source 12 is connected between the holder 4 and earth and the bias voltage of positive or both positive and negative AC is impressed to the substrate 6 or the substrate holder 4. The surface treatment of the substrate 6 by ion implantation is executed when an ion beam 10 is independently projected to the substrate 6 by using an ion source 8. A thin film is formed on the surface of the substrate 6 if the vapor deposition of metallic vapor 16 on the substrate 6 and the projection of the ion beam 10 thereto are executed simultaneously or alternately. Since the bias voltage is impressed to the substrate 6, etc., at this time, the electrification on the treated surface of the substrate is suppressed and the breakdown of the treated surface by microdischarge is prevented. Good-quality treated surface is thus obtd.
COPYRIGHT: (C)1988,JPO&Japio
JP17143286A 1986-07-21 1986-07-21 Surface treatment equipment Expired - Lifetime JPH0774442B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17143286A JPH0774442B2 (en) 1986-07-21 1986-07-21 Surface treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17143286A JPH0774442B2 (en) 1986-07-21 1986-07-21 Surface treatment equipment

Publications (2)

Publication Number Publication Date
JPS6328861A true JPS6328861A (en) 1988-02-06
JPH0774442B2 JPH0774442B2 (en) 1995-08-09

Family

ID=15923017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17143286A Expired - Lifetime JPH0774442B2 (en) 1986-07-21 1986-07-21 Surface treatment equipment

Country Status (1)

Country Link
JP (1) JPH0774442B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02162301A (en) * 1988-10-07 1990-06-21 Valeo Vision Method to give wear resistance to lens and lens produced by that
JP2003507906A (en) * 1999-08-06 2003-02-25 アクセリス テクノロジーズ インコーポレーテッド Ion implantation system and method
US10193116B2 (en) * 2012-12-13 2019-01-29 Applied Materials, Inc. Ceramic coating on battery separators

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02162301A (en) * 1988-10-07 1990-06-21 Valeo Vision Method to give wear resistance to lens and lens produced by that
JP2003507906A (en) * 1999-08-06 2003-02-25 アクセリス テクノロジーズ インコーポレーテッド Ion implantation system and method
US10193116B2 (en) * 2012-12-13 2019-01-29 Applied Materials, Inc. Ceramic coating on battery separators
US10756321B2 (en) 2012-12-13 2020-08-25 Applied Materials, Inc. Ceramic coating on battery separators

Also Published As

Publication number Publication date
JPH0774442B2 (en) 1995-08-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term