JPS63280982A - Clean valve with diaphragm - Google Patents

Abstract

PURPOSE:To maintain the interior of a valve chamber always clean by forming a small hole in the center of a diaphragm to interconnect a valve rod to a valve rod forcing rod through the small hole. CONSTITUTION:A diaphragm 6' is provided in the center with a small hole 25 and the upper end of valve rod 5' is screwed through the small hole 25 into a valve rod forcing rod 7'. A seal ring 28 is inserted between the connection end faces to fasten threads 26, 27 on both ends. Thus, a coiled spring for pushing up the valve rod 5' and diaphragm 6' into a valve chamber 2 does not need to be installed and members generating metal rub by opening and closing operations of valve are eliminated so that the interior of valve chamber 2 can be maintained always clean.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a clean valve with a diaphragm used in a piping line of an IC manufacturing device.

[Prior Art] A conventional clean valve with a diaphragm has a structure as shown in FIG. is an inverted T-shaped valve box, in which a valve chamber 2 is formed in the vertical part 1a, a fluid inlet passage 3 and a fluid outlet passage 4 are formed in the horizontal part 1b to communicate with the valve chamber 2, and the fluid inlet passage 3 is formed in the horizontal part 1b. The inner end side is perpendicular to the valve chamber 2. The valve stem 5 arranged at the center of the valve chamber 2 is inserted into a diaphragm pushing piece 8 at the tip of a valve stem pushing rod 7, which will be described later, via a diaphragm 6. 9 is a valve stem ring;
Reference numeral 10 denotes a seal ring set on a stepped portion 2b formed in the upper part of the valve chamber 2. The peripheral edge of the diaphragm 6 rests on this seal ring 10, and the diaphragm 6
The peripheral edge of the nut 11 and the seal ring 10 are connected to the valve body 1 of the nut 11.
The vertical portion 1a is screwed onto the outer periphery of the vertical portion 1a, so that the bonnet 12 is tightened and held therebetween. The valve stem push rod 7
is press-fitted and fixed into a center lower hole 14a of a piston 14 in the air cylinder 13, and a spring 16 is press-fitted between the piston 14 and the cylinder cover 15.

An inlet port 17 is located on the top surface of the air cylinder 13.
An outlet ring 18 is fitted onto the outer periphery of the convex portion 15a of the cylinder cover 15, and its handling is stopped by an outlet ring receiver 19.

An outlet port 20 of the outlet ring 18 communicates with the lower chamber of the cylinder 13 via an outlet port 21 of the cylinder cover 15. The bonnet 12
is screwed onto the inner periphery of the convex portion 15a of the cylinder cover 15, and the nut 11. An outlet ring receiver 19 is held between the cylinder cover 15 and the cylinder cover 15. bonnet 1
A guide bush 22 for guiding the valve stem push-in rod 7 is screwed and fixed to the female thread on the inner periphery of 2 by a male thread provided on the outer periphery.

The feature of the clean valve with a diaphragm having the above structure is that a seal ring 1 is placed between the bonnet 12 and the vertical part 1a of the valve body 1.
By installing the diaphragm 6 through the valve 0, the drive operating section (air cylinder) and the valve body are isolated, and fine particles are prevented from entering the valve chamber 2 of the valve box 1 from the outside of the valve and the drive operating section. The goal is to prevent

The piston 14 is pushed down against the spring 16, and the valve stem pushing rod 7 is lowered together. The lower end of the valve stem pushing rod 7 pushes down the center of the diaphragm 6 via the diaphragm pushing piece 8,
This causes the diaphragm 6 to deflect downward. As the diaphragm 6 bends, its lower surface pushes the valve stem 5 downward against the upward force of the valve stem push-up spring 9, and eventually the lower surface of the valve stem 5 contacts and is pressed against the valve seat 2a at the bottom of the valve chamber 2. The valve is closed.

By bringing the pressure inside the air cylinder 13 to atmospheric pressure, the piston 14 is pushed back upward by the reaction force of the spring 16, and accordingly, the valve stem pushing rod 7 also moves upward and acts on the diaphragm pushing piece 8. The downward pushing force that had been in place is released. At the same time, the valve stem pushing up spring 9 pushes up the valve stem 5, and roughly the upper end of the valve stem 5 is pushed up by the diaphragm 6 and the diaphragm pushing piece 8.
will be pushed back upwards. As described above, when the valve stem 5 is pushed upward, a gap is created between the valve stem 5 and the valve seat 2a, and the valve is opened.

[Problems to be solved by the invention] By the way, in the above-mentioned conventional clean valve with a diaphragm,
A major problem is that the valve stem push-up spring 9 is inserted into the valve chamber 2. That is, in recent ICs, the elements within the IC chip and the lines that connect them are becoming increasingly finer.
Along with this, the size of particles allowed in the manufacturing process is also becoming smaller and smaller. In such a situation, the presence of the valve stem push-up spring 9 in the valve chamber 2 of the valve body 1 means that it expands and contracts every time the valve is opened and closed. Since the valve stem push-up spring 9 is in the form of a coil, both end surfaces of the valve stem 9 cause a relatively small movement (mainly rotation) as it expands and contracts. This means that the metals rub against each other, and as a result, minute metal particles are generated within the valve chamber 2. Therefore, installing such a clean valve with a diaphragm in the piping line of IC manufacturing equipment may cause minute metal particles to adhere to parts manufactured during the IC manufacturing process, resulting in a decrease in the yield of IC products. There is a big problem of decline.

[Object of the Invention] The present invention has been made in view of the above-mentioned circumstances, and provides a diaphragm-equipped clean that eliminates the valve stem push-up spring that exists in the valve chamber of the valve box, and does not place any members that cause metal abrasion in the valve chamber. The purpose is to provide valves.

[Means for Solving the Problems] A clean valve with a diaphragm of the present invention to solve the above-mentioned problems keeps the inside of the valve box clean by separating the inside of the valve box and the opening/closing operation part of the valve by a diaphragm. In a clean valve with a diaphragm, a circular small hole is made in the center of the diaphragm, the valve stem and the valve stem push rod are connected to each other through the small hole with screws, and a circular seal ring is provided between the connecting end surfaces. The valve chamber of the valve box and the driving part of the valve are isolated by sandwiching the peripheral edge of the small hole of the diaphragm and tightening the screws between the ends.

[Function] The clean valve with a diaphragm configured as described above does not have a coil-shaped spring inside the valve chamber to push up the valve stem and diaphragm, and there is also no member that would cause metal abrasion during the opening and closing operations of the valve. , no minute metal particles are generated inside the valve chamber.

[Embodiment] An embodiment of a clean valve with a diaphragm according to the present invention will be described with reference to FIG. 1. 1 is an inverted T-shaped valve box, a valve chamber 2 is formed in a vertical part 1a, and a fluid inlet is formed in a horizontal part 1b. A passage 3 and a fluid outlet passage 4 are formed to communicate with the valve chamber 2, and the inner end side of the fluid inlet passage 3 is perpendicular to the valve chamber 2. The valve stem 5° placed in the center of the valve chamber 2 is inserted into the valve stem pushing rod 7 through a circular small hole 25 bored in the center of the diaphragm 6° whose upper end is made of a special steel thin disc.
26. The inner periphery of a circular seal ring 28 and the small hole 25 of 6° in the diaphragm are connected by screwing an ill screw 27 between the connecting end surfaces.
The inner peripheral portions of the two ends are sandwiched, and the screws 26 and 27 at the ends are tightened. Further, the outer circumference of the seal ring 28 rests on a stepped portion 2b formed in the upper part of the valve chamber 2, and the outer circumference of the diaphragm 6° rests on this step.As shown in FIG. The nut 11 is screwed onto the outer periphery of the vertical portion 1a of the valve body 1, and the 6° outer circumferential portion of the diaphragm is clamped and clamped via the bonnet 12°. As shown in the figure, a horizontal hole 29 is drilled horizontally at the connecting portion between the valve stem 5' and the valve stem push rod 7°, and a spring pin 30 is inserted into this to prevent the male thread L; 26 and the female thread 21 from loosening. There is. The valve stem pushing rod 7° is inserted into the piston 14° inside the air cylinder 13° as shown in Figure 1.
A spring 16° is press-fitted between the piston 14' and the cylinder cover 15°. The upper end of the bonnet 12° is screwed into the lower surface recess 15b of the cylinder cover 15°, and the guide bushing 22′ of the valve stem push-in Ron door is press-fitted into the lower part of the bonnet 12°. 22° and a spring receiver 31 screwed onto the outer periphery of the valve stem pushing rod 7°, a valve stem pushing spring 32 is press-fitted.

Diaphragm attachment ring 16 of the embodiment configured in this way
° and against the valve stem push-up spring 32, the piston 1
Push down 4 degrees and lower the valve stem push rod 7 degrees together. The lower end of the valve stem push rod 7° is the valve stem 5°.
It is connected to the upper end with a screw, and the inner periphery of the circular seal ring 28 and the inner periphery of the small hole 25 of the diaphragm 6° are tightened between the connecting end faces, so that the valve stem pushing rod 7° As the valve stem 5 degrees descends, the diaphragm 6 degrees bends downward. Eventually, the lower surface of the valve stem 5' comes into contact with and is pressed against the valve seat 2a at the bottom of the valve chamber 2, and the valve is closed.

By discharging air from the air cylinder 13° and bringing the pressure inside the air cylinder 13° to atmospheric pressure, the piston 14'' is returned upward by the reaction force of the spring 16°, and the valve stem push rod 7° is accordingly moved by the reaction force of the spring 32. The force moves the valve stem 5° upward via the spring receiver 31, and the valve stem 5° connected to the lower end of the stem also moves upward, creating a gap with the valve seat 2a and opening the valve. .and diaphragm 6'
will be restored to its original state.

In such a valve opening/closing operation, the operating side that moves the valve chamber 2 and the valve stem push rod 7 degrees up and down is the diaphragm 6.
° and seal ring 28, so fine particles will not enter the valve chamber 2 from the outside of the valve or the operating side, and there will be no metal scratches inside the valve chamber 2 due to the opening and closing operations of the valve. Since it is not placed at all,
No minute metal particles are generated in the valve chamber 2, and the inside of the valve chamber 2 can be kept clean.

[Effects of the Invention] As can be seen from the above explanation, the clean valve with a diaphragm of the present invention not only completely isolates the inside of the valve box from the opening/closing operation part of the valve by the diaphragm and the seal ring, but also Since there are no members placed inside the box that cause metal abrasion due to the opening/closing operation of the valve, particles will not enter or be generated within the valve chamber, and the inside of the valve chamber can always be kept clean. Therefore, when installed in the piping line of IC manufacturing equipment, it can solve the problems of conventional clean valves with diaphragms, so it can be said to be revolutionary.

[Brief explanation of the drawing]

Fig. 1 is a longitudinal sectional view showing an embodiment of the clean valve with a diaphragm of the present invention, Fig. 2 is an enlarged view of part A in Fig. 1, and Fig. 3 is a longitudinal sectional view showing a conventional clean valve with a diaphragm. be. 1...Valve box, 2...Valve chamber, 5"...Valve stem, 6"...
...Diaphragm, 7°...Valve stem push rod, 1
1...nut, 12°...bonnet, 13°...
・Air cylinder, 14°...Piston, 15°・
...Cylinder cover, 25°...Diaphragm small hole, 26...Male thread, 27...Female thread, 28...
Seal ring, 29... side hole, 30... spring pin, 31... spring receiver, 32... valve stem push-up spring.

Claims (1)

[Claims] In clean valves with diaphragms that keep the inside of the valve box clean by separating the inside of the valve box and the opening/closing part of the valve with a diaphragm, a small circular hole is made in the center of the diaphragm, and the valve stem and valve stem push rod are inserted into the valve stem. The ends are connected with a screw through the small hole, and the annular seal ring and the peripheral edge of the small hole of the diaphragm are sandwiched between the connected end surfaces, and the screws between the ends are tightened to connect the valve chamber of the valve box. A clean valve with a diaphragm that is characterized by separating the valve drive part from the valve drive part.