JPS6326708B2 - - Google Patents

Info

Publication number
JPS6326708B2
JPS6326708B2 JP54157795A JP15779579A JPS6326708B2 JP S6326708 B2 JPS6326708 B2 JP S6326708B2 JP 54157795 A JP54157795 A JP 54157795A JP 15779579 A JP15779579 A JP 15779579A JP S6326708 B2 JPS6326708 B2 JP S6326708B2
Authority
JP
Japan
Prior art keywords
liquid
recording
ink
ejection
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54157795A
Other languages
Japanese (ja)
Other versions
JPS5680477A (en
Inventor
Yasushi Takatori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15779579A priority Critical patent/JPS5680477A/en
Publication of JPS5680477A publication Critical patent/JPS5680477A/en
Priority to JP61289184A priority patent/JPS62156971A/en
Publication of JPS6326708B2 publication Critical patent/JPS6326708B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1606Coating the nozzle area or the ink chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

[産業上の利用分野] 本発明は一般にインクと呼ばれる記録液を微細
オリフイス(吐出口)から小滴として吐出し、飛
翔させ、この小滴の被記録面への付着を似て記録
を行なう液体噴射記録ヘツド、特に使用耐久性を
向上させた新規な構成を有する液体噴射記録ヘツ
ドに関する。 [従来の技術] 現在知られる各種の記録方式の中でも、記録時
に騒音の発生がほとんどないノンインパクト記録
方式であつて、且つ、高速記録が可能であり、し
かも普通紙に特別の定着処理を必要とせずに記録
の行える所謂インクジエツト記録法(液体噴射記
録法)は、極めて有用な記録方式であると認めら
れている。このインクジエツト記録法に就いて
は、これ迄にも様々の方法が提案され、改良が加
えられて商品化されたものもあれば、現在もな
お、実用化への努力が続けられているものもあ
る。 インクジエツト記録法は、インクと称される記
録液の小液滴(droplet)を種々の作用原理で飛
翔させ、それを紙等の被記録部材に付着させて記
録を行うものである。そして、本出願人も、斯か
るインクジエツト記録法に係る新規方式に就いて
既に提案を行なつている。この新規方式は例えば
特願昭52−118798号(特開昭54−59936号)にお
いて提案されており、その一つの液体吐出法は次
に概説する通りである。 つまり、記録液を収容することのできる微細な
液路に導入された記録液に熱による状態変化を生
起させ、該状態変化に基づいて記録液を前記吐出
口より吐出させて飛翔的液滴を形成し、これを被
記録部材に付着させて記録を行う方式である。 このような液体吐出法による新規方式には、実
施装置の構成が従来の方式による装置に比べて簡
略であること、及び吐出口をマルチ構成にして高
速記録に適合させ易いことと言う大きな長所があ
る。 [発明が解決しようとする問題点] ところで、上記の液体吐出法による装置の場
合、記録液に熱的パルスを入力する手段として発
熱抵抗体及び該発熱抵抗体に電気信号を付与する
ためのリード電極を採用し、これ等が記録液に接
した状態で繰返し使用するような場合には、記録
液が充分なる電気絶縁性を備えていないとする
と、酸化や腐食により機能劣化を起したり、場合
によつては、作動不能に陥ることもなくはない。
又、記録液が電気分解されたり、リード電極の腐
蝕によつて、記録液中に不溶解成分が混在して所
期の液体の吐出を妨害する等の不都合が生ずるこ
ともなくはなかつた。 [目的] そこで、本発明では、上記の点を解消し、なお
一層の改善を施してなる新規構成の液体噴射記録
ヘツドを提案する。 つまり、本発明に於いては、その使用寿命がよ
り長期に亘る液体噴射記録ヘツドを提案すること
を主目的とする。 又、本発明に於いては、構造的に簡略であると
共に、熱作用による記録液の安定的吐出をより長
時間に亘り保障する液体噴射記録ヘツドを提供す
ることも他の目的とする。 加えて、本発明に於いては、優れた使用耐久性
と高速記録とを保証するマルチアレイ型式の液体
噴射記録ヘツドを提供することも又別の目的とし
ている。 [問題点を解決するための手段] 本発明の液体噴射記録ヘツドとは、記録液を吐
出する吐出口の複数と、対応する吐出口毎に設け
られ該吐出口に連通する液路と、対応する液路に
設けられ、記録液に熱による状態変化を生起させ
該状態変化に基づいて記録液を前記吐出口より吐
出させて飛翔的液滴を形成するために利用される
熱エネルギーを発生する発熱部と、該発熱部に電
気信号を付与するためのリード電極と、該リード
電極上に設けられ前記液路に記録液を供給するた
めの共通液室と、該共通液室下のリード電極を覆
う様に設けられた有機被膜と、を有することを特
徴とするものである。 [実施例] 以下、図面に示された具体例に従つて、本発明
を詳細に説明する。 先ず、第1図及び第2図を用いて、本発明に係
る液体噴射記録ヘツドの一例及びその液体噴射原
理に就いて説明する。 第1図は、液体噴射記録ヘツドの主要部の概要
を示す模式的斜視図である。 発熱体設置基板1の表面には発熱部2を有する
発熱体が設けられている。基板3の材料として
は、ガラス、セラミツク或いは耐熱製プラスチツ
ク等が用いられる。基板3には、吐出前のインク
を収容する室(液路)4′及び吐出オリフイス5
を構成する長尺溝4が予め形成してあり、この基
板3と前記発熱体設置基板1とは、発熱部2と溝
4の位置合せをした後、接着剤によつて接合して
一体化される。 次に、この第1図に示されるヘツドに係る液滴
噴射原理に就いて簡単に述べる。第2図は、第1
図の溝4の軸線に沿つた模式的断面図である。記
録用インクIKは、図中矢印で示される様に液路
4′内へ供給されている。今、液路4′内の一部に
付設された発熱部2に対して外部から電気信号が
付与されると、発熱部2は発熱し、その近傍のイ
ンクIKに熱エネルギーを与える。熱エネルギー
を受けたインクIKが体積膨張或いは気泡の発生
等の状態変化を起こして圧力変化が生じ、この圧
力変化が吐出オリフイス5の方向に伝わり、イン
クIKが小滴10となつて吐出される。そして、
この小滴10が不図示の紙等、任意の被記録材に
付着することによつて記録が為される。第2図に
於いては、発熱体設置基板1の詳細構造も図示さ
れている。この発熱部2は、アルミナ等の基板6
上に、蓄積層7、発熱抵抗体11、電極8を順
次、薄膜形成技術によつて積層し、発熱抵抗体1
1及び電極8を所定の形状のパターニングした
後、更に、金属酸化物から成る保護層9を積層し
て構成される。そして、この発熱部2の表面は液
路4′内のインクIKと接触するために液路4′内
に露出する構成となつている。発熱部2におい
て、インクIKが直接接するのは保護層9である
が、この保護層9は発熱抵抗体11が直接にイン
クIKと接触して酸化されたり、逆に、インクIK
が電気分解されるのを防いでいる。具体的に、こ
の保護層9の厚さは、インク吐出の熱応答性、或
はエネルギー効率の良否を左右するから、できる
だけ薄い方が望ましい。 次に、叙上の所謂、シングルオリフイスタイプ
の液体噴射記録ヘツドをマルチオリフイスタイプ
の装置に変更した場合の発熱部と電極の配置形態
の例を模式的平面図として描いたものが次の第3
図a及び第3図bである。 第3図aに於いては、アルミニウム等から成る
リード電極21−1,………,21−5及び22
−1,………,22−5、と発熱抵抗体23−
1,………,23−5とから成るパターンが図示
されており、このパターンを以下の説明ではu型
と略称する。 又、第3図bに於いては、リード電極24及び
25−1,………,25−5と発熱抵抗体26−
1,………,26−5とから成る別のパターンが
図示されている。 そして、このパターンを以下の説明に於いて
は、S型と略称する。 そして、何れの図面の於いても、一点破線で囲
つてある領域27,28に、インクつまり記録液
の流路が設置される。 この様な構造における液体噴射記録ヘツドにお
いて、流路下の電極が記録液に直接露出している
場合には、記録操作を続けてゆくと、下記の様な
現象が観察される場合があつた。即ち、 (1) 発熱体の設置数及び密度が増加するに従つ
て、記録液の流路に於いて電極の腐蝕が生じ易
く、その結果、記録液の吐出状態が不良になる
こと。 (2) このような電極の腐蝕は、ほとんど、第3図
a及び第3図bに図示した例に於いて交差線で
示した領域、つまり記録液の中継室(共通液
室)部に於いて生じることが観察された。そし
て、上記電極の腐蝕は、隣接電極間にできる電
位差に基づき、記録液を介して電解が起こるこ
とにより進行していることも判つた。そこで、
本発明者は、この電極の腐蝕現象を防ぐには、
近接電極同志が、記録液と非接触状態を保てば
良いことに気付き本発明を提案するに至つた。
即ち、本発明に於ける具体的方策は発熱抵抗体
を覆つている保護膜の他に、特に、リード電極
上にこの電極と記録液が接触することを防ぐ、
有機被膜を設けることである。 なお、この被膜は少なくとも発熱体の発熱部
上には設けない方が望ましい。何故なら、発熱
部上に保護膜及びこの被膜の両者を形成する
と、全体の層厚が厚くならざるを得ない場合が
あり、その場合には熱伝達効率を悪くし、ひい
ては、記録液の吐出効率を低下させることにな
る場合もあるからである。 本発明に於いて、リード電極上に被膜を形成す
る為の材料としては、成膜性が良いこと、緻
密な構造でかつピンホールが少ないこと、使用
インクに対し膨張、溶解しないこと、電極層等
の下層との接着性が良いこと、場合によつては
耐熱性が高いこと(発熱体の発熱部の近くに設け
ることを考慮して)等の物性を具備することが望
ましく、例えば、シリコーン樹脂、フツ素樹脂、
芳香族ポリアミド、付加重合型ポリイミド、ポリ
ベンズイミダゾール、金属キレート重合体、チタ
ン酸エステル、エポキシ樹脂、フタル酸樹脂、熱
硬化性フエノール樹脂、P−ビニルフエノール樹
脂、ザイロツク樹脂、トリアジン樹脂、BT樹脂
(トリアジン樹脂とビスマレイミド付加重合樹脂)
等の樹脂が用いられる。これ等の樹脂を成膜する
には、該樹脂を溶剤で希釈した後、リード電極上
に、回転塗布、スプレー塗布、浸漬塗布等の手法
を用いて塗布した後、乾燥硬化させれば良い。 又、この他に、ポリキシンリレン樹脂及び、そ
の誘導体を蒸着によつて成膜する方法も望まし
い。 更に、種々の有機化合物モノマー、例えばチオ
ウレア、チオアセトアミド、ビニルフロセン、
1,3,5−トリクロロベンゼン、クロロベンゼ
ン、スチレン、フエロセン、ピコリン、ナフタレ
ン、ペンタメチルベンゼン、ニトロトルエン、ア
クリロニトリル、ジフエニルセレナイド、P−ト
ルイジン、P−キシレン、N,N−ジメチル−P
−トルイジン、トルエン、アニリン、ジフエニル
マーキユリー、ヘキサメチルベンゼン、マロノニ
トリル、テトラシアノエチレン、チオフエン、ベ
ンゼンセレノール、テトラフルオロエチレン、エ
チレン、N−ニトロソジフエニルアミン、アセチ
レン、1,2,4−トリクロロベンゼン、プロパ
ンをプラズマ重合法により、リード電極上に成膜
させても良い。 叙上の被膜の厚さは、本発明に於いては、乾燥
後の膜厚で通常は0.01μm〜10μm、好適には0.1
mμ〜5μm、最適には0.1μm〜3μmのである。 本発明に於いて好適な被膜の設置態様は、次に
図示する2つがある。これ等を第4図及び第5図
に模式的平面図として示す。 つまり、第4図は先述のu型パターンが形成さ
れた記録ヘツドを模式的に示したものであり、こ
の場合は、交差線で区分された領域にのみ叙上の
被膜を形成する。この領域外に於いては一方のリ
ード電極21−1,………,21−5が記録液に
接することはないので、他方の電極22−1,…
……,22−5が仮令記録液と接触しても、腐蝕
が起きにくい。 次に、第5図は、先述のs型パターンが形成さ
れた記録ヘツドを模式的に示したものであり、こ
の場合は、流路中の記録液に露出する電極24及
び25−1,………,25−5が完全に覆われる
よう、図中、交差線で区分された全領域に叙上の
被膜を形成する。 尚、第4図及び第5図中では、第3図a,b中
のものと同一の記号を付してある。そして夫々の
説明も、第3図a,bに係る説明を採用する。 以下、実施例によつて、本発明を更に具体的に
説明する。 実施例1〜9、比較例 先ず、以下の実施例及び比較例に相当する第4
図に示した発熱体設置基板を以下の要領で作成し
た。 アルミナ基板上にSiO2蓄熱層(厚さ5μm)、
ZrB2発熱抵抗体層(厚さ800Å)及びアルミニウ
ム電極層(厚さ5000Å)を順次形成した後、選択
エツチングにより幅40μm、長さ200μmの発熱抵
抗体23−1,………,23−5を形成した。
又、エツチングにより同幅のリード電極21−
1,………,21−5及び22−1,………,2
2−5を形成した。 以上の操作に加えて発熱抵抗体23−1,……
…,23−5を覆うように、SiO2保護層(厚さ
1μ)をスパツタリングにより設けた。そして、
第4図に於いて交差線で示したインク供給の為の
中継室(共通液室)に相当する領域には、下表−
1及び下表−2に記載どおりの被膜を夫々設け
た。 又、これ等とは別に、ガラス板(厚さ1mm)
に、第6図に示すような、発熱抵抗体と同数、同
ピツチの溝30(幅40μm、深さ40μm)と共通
液室31とからなる溝とをマイクロカツターを用
いて切削形成してなる溝付きプレート32を作成
した。 このようにして作成した、各発熱体設置基板と
溝付プレートとを、各発熱抵抗体と溝との位置合
せをした上で接合し、更に、不図示のインク供給
部からの共通液室31にインクを導入するための
インク導入管33も接続して第7図に示すような
記録ヘツドブロツク34を一体的に完成した。 更に、このブロツク34には電極リードを有す
るリード基板が付設されて、前述のリード電極2
1−1,………,21−5及び22−1,……
…,22−5に前記リード電極が接続された。次
いで、吐出実験条件として、前記電極リードを介
して発熱抵抗体に10μsecのパルス巾、200μsecの
パルス入力周期で40Vの矩形電圧パルスを印加し
た。因に、用いたインクの組成は 水 70重量部 ジエチレングリコール 29重量部 黒色染料 1重量部 であつた。 上記吐出実験条件およびインクを用いてインク
吐出実験を行つたところ、下表−1に示すとお
り、実施例では比較例に較べて記録ヘツドの耐久
性において優れた結果を得た。また記録性におい
ても優れていた。 なお、これ等の実施例及び比較例に於ける耐久
性の評価は、次のとおりインクの吐出が応答する
電気パルスの繰返し印加可能回数により行つた。 A………109回以上 耐久性評価基準 B………108〜109回 C………105回以下
[Industrial Application Field] The present invention is a liquid that performs recording by ejecting a recording liquid, generally called ink, as small droplets from a fine orifice (discharge port), causing the droplets to fly, and making the adhesion of these droplets to a recording surface similar to that of the liquid for recording. The present invention relates to a liquid jet recording head, and particularly to a liquid jet recording head having a novel structure with improved durability in use. [Prior Art] Among the various recording methods currently known, this is a non-impact recording method that generates almost no noise during recording, is capable of high-speed recording, and requires special fixing treatment on plain paper. The so-called inkjet recording method (liquid jet recording method), which allows recording to be performed without the need for liquid jet recording, is recognized as an extremely useful recording method. Various methods have been proposed for this inkjet recording method, some have been improved and commercialized, and others are still being worked on to put them into practical use. be. In the inkjet recording method, recording is performed by ejecting small droplets of recording liquid called ink using various principles of operation and adhering them to a recording medium such as paper. The present applicant has also already proposed a new system related to such an inkjet recording method. This new method has been proposed, for example, in Japanese Patent Application No. 52-118798 (Japanese Unexamined Patent Publication No. 54-59936), and one of the liquid ejection methods is as outlined below. In other words, the recording liquid introduced into a fine liquid path capable of containing the recording liquid undergoes a state change due to heat, and based on the state change, the recording liquid is ejected from the ejection port to form flying droplets. This is a method in which recording is performed by forming a recording medium and attaching it to a recording member. This new liquid ejection method has the great advantage that the configuration of the device used is simpler than that of conventional devices, and that it is easy to adapt to high-speed recording by configuring multiple ejection ports. be. [Problems to be Solved by the Invention] Incidentally, in the case of the apparatus using the liquid ejection method described above, a heating resistor and a lead for applying an electric signal to the heating resistor are used as means for inputting a thermal pulse to the recording liquid. If electrodes are used and are repeatedly used in contact with recording liquid, if the recording liquid does not have sufficient electrical insulation, they may deteriorate in function due to oxidation or corrosion. In some cases, it may become inoperable.
In addition, problems such as electrolysis of the recording liquid or corrosion of the lead electrodes, in which undissolved components are mixed in the recording liquid and obstruct the intended ejection of the liquid, do not occur. [Purpose] Therefore, the present invention proposes a liquid jet recording head with a new configuration that solves the above-mentioned problems and provides further improvements. That is, the main object of the present invention is to propose a liquid jet recording head that has a longer service life. Another object of the present invention is to provide a liquid jet recording head which is structurally simple and which ensures stable ejection of recording liquid over a longer period of time due to thermal action. In addition, another object of the present invention is to provide a multi-array liquid jet recording head that guarantees excellent durability and high-speed recording. [Means for Solving the Problems] The liquid jet recording head of the present invention includes a plurality of ejection ports for ejecting recording liquid, a liquid path provided for each corresponding ejection port and communicating with the ejection ports, and a corresponding one. The recording liquid is installed in a liquid path to cause a state change in the recording liquid due to heat, and based on the state change, the recording liquid is ejected from the ejection port to generate thermal energy that is used to form flying droplets. A heat generating part, a lead electrode for applying an electric signal to the heat generating part, a common liquid chamber provided on the lead electrode for supplying recording liquid to the liquid path, and a lead electrode below the common liquid chamber. It is characterized by having an organic film provided so as to cover the. [Example] Hereinafter, the present invention will be described in detail according to specific examples shown in the drawings. First, an example of a liquid jet recording head according to the present invention and its liquid jet principle will be explained with reference to FIGS. 1 and 2. FIG. 1 is a schematic perspective view showing the outline of the main parts of a liquid jet recording head. A heating element having a heating section 2 is provided on the surface of the heating element installation board 1 . As the material for the substrate 3, glass, ceramic, heat-resistant plastic, or the like is used. The substrate 3 includes a chamber (liquid path) 4' for storing ink before ejection and an ejection orifice 5.
A long groove 4 constituting the substrate 3 is formed in advance, and after aligning the heating element 2 and the groove 4, this substrate 3 and the heating element installation substrate 1 are bonded with adhesive to be integrated. be done. Next, the principle of droplet ejection related to the head shown in FIG. 1 will be briefly described. Figure 2 shows the first
FIG. 4 is a schematic cross-sectional view taken along the axis of the groove 4 shown in the figure. The recording ink IK is supplied into the liquid path 4' as indicated by the arrow in the figure. Now, when an electric signal is applied from the outside to the heat generating part 2 attached to a part of the liquid path 4', the heat generating part 2 generates heat and gives thermal energy to the ink IK in the vicinity thereof. The ink IK that has received thermal energy undergoes a state change such as volumetric expansion or the generation of bubbles, resulting in a pressure change, and this pressure change is transmitted in the direction of the ejection orifice 5, and the ink IK is ejected as small droplets 10. . and,
Recording is performed by adhering these droplets 10 to an arbitrary recording material such as paper (not shown). In FIG. 2, the detailed structure of the heating element installation board 1 is also illustrated. This heat generating part 2 has a substrate 6 made of alumina or the like.
A storage layer 7, a heat generating resistor 11, and an electrode 8 are sequentially laminated on top using a thin film forming technique.
After patterning the electrode 1 and the electrode 8 into a predetermined shape, a protective layer 9 made of metal oxide is further laminated. The surface of this heat generating portion 2 is exposed in the liquid path 4' in order to come into contact with the ink IK in the liquid path 4'. In the heat generating section 2, the ink IK comes into direct contact with the protective layer 9, and the heat generating resistor 11 of this protective layer 9 may directly contact the ink IK and be oxidized, or conversely, the ink IK may
prevents it from being electrolyzed. Specifically, the thickness of the protective layer 9 influences the thermal response of ink ejection or the quality of energy efficiency, so it is desirable that it be as thin as possible. Next, the following is a schematic plan view of an example of the arrangement of the heat generating part and electrodes when the so-called single-orifice type liquid jet recording head is changed to a multi-orifice type device.
Figure a and Figure 3b. In FIG. 3a, lead electrodes 21-1, 21-5 and 22 made of aluminum or the like are shown.
-1, ......, 22-5, and heating resistor 23-
A pattern consisting of 1, . In addition, in FIG. 3b, the lead electrodes 24 and 25-1, 25-5 and the heating resistor 26-
1, . . . , 26-5 is illustrated. In the following explanation, this pattern will be abbreviated as S type. In both drawings, flow paths for ink, that is, recording liquid, are provided in areas 27 and 28 surrounded by dotted lines. In a liquid jet recording head with such a structure, if the electrode under the flow path is directly exposed to the recording liquid, the following phenomena may be observed as recording operations are continued. . That is, (1) As the number and density of heating elements increases, corrosion of the electrodes in the flow path of the recording liquid tends to occur, resulting in poor recording liquid discharge conditions. (2) Most of the corrosion of the electrodes occurs in the area shown by the cross lines in the examples shown in Figures 3a and 3b, that is, in the recording liquid relay chamber (common liquid chamber). It was observed that this occurs when It was also found that the corrosion of the electrodes progresses due to electrolysis occurring through the recording liquid based on the potential difference created between adjacent electrodes. Therefore,
The inventors believe that in order to prevent this electrode corrosion phenomenon,
The inventors realized that it is sufficient if the adjacent electrodes are kept in a non-contact state with the recording liquid, and came to propose the present invention.
That is, the specific measures in the present invention include, in addition to the protective film covering the heating resistor, in particular, preventing contact between the lead electrode and the recording liquid.
It is to provide an organic film. Note that it is preferable that this coating is not provided at least on the heat generating part of the heat generating element. This is because, if both the protective film and this film are formed on the heat-generating part, the overall layer thickness may have to be increased, and in that case, the heat transfer efficiency will deteriorate, and the ejection of the recording liquid will be affected. This is because efficiency may be reduced in some cases. In the present invention, the material for forming the film on the lead electrode must have good film forming properties, have a dense structure with few pinholes, do not swell or dissolve in the ink used, and must be suitable for the electrode layer. It is desirable to have physical properties such as good adhesion with the lower layer of silicone, and in some cases, high heat resistance (taking into account that it is installed near the heat generating part of the heating element).For example, silicone resin, fluororesin,
Aromatic polyamide, addition polymerized polyimide, polybenzimidazole, metal chelate polymer, titanate ester, epoxy resin, phthalic acid resin, thermosetting phenol resin, P-vinylphenol resin, Zylock resin, triazine resin, BT resin ( triazine resin and bismaleimide addition polymer resin)
Resins such as are used. To form a film using these resins, the resin may be diluted with a solvent, applied onto the lead electrode by spin coating, spray coating, dip coating, or the like, and then dried and cured. In addition to this, it is also desirable to form a film using a polyxin rylene resin or a derivative thereof by vapor deposition. Furthermore, various organic compound monomers such as thiourea, thioacetamide, vinylfurocene,
1,3,5-trichlorobenzene, chlorobenzene, styrene, ferrocene, picoline, naphthalene, pentamethylbenzene, nitrotoluene, acrylonitrile, diphenylselenide, P-toluidine, P-xylene, N,N-dimethyl-P
-Toluidine, toluene, aniline, diphenylmercury, hexamethylbenzene, malononitrile, tetracyanoethylene, thiophene, benzeneselenol, tetrafluoroethylene, ethylene, N-nitrosodiphenylamine, acetylene, 1,2,4-tri A film of chlorobenzene or propane may be formed on the lead electrode by plasma polymerization. In the present invention, the thickness of the above-mentioned film is usually 0.01 μm to 10 μm, preferably 0.1 μm after drying.
mμ to 5 μm, optimally 0.1 μm to 3 μm. In the present invention, there are two preferred methods of installing the coating as shown below. These are shown as schematic plan views in FIGS. 4 and 5. That is, FIG. 4 schematically shows a recording head in which the above-mentioned U-shaped pattern is formed, and in this case, the above-mentioned coating is formed only in the area divided by the intersecting lines. Outside this area, one of the lead electrodes 21-1, . . . , 21-5 does not come into contact with the recording liquid, so the other electrodes 22-1, .
..., 22-5 is unlikely to be corroded even if it comes into contact with the temporary recording liquid. Next, FIG. 5 schematically shows a recording head in which the aforementioned S-shaped pattern is formed, and in this case, the electrodes 24 and 25-1, . . . exposed to the recording liquid in the flow path are shown in FIG. . . , 25-5 is completely covered with the above-mentioned coating over the entire area divided by the intersecting lines in the figure. In addition, in FIGS. 4 and 5, the same symbols as those in FIGS. 3a and 3b are given. The respective explanations also adopt the explanations related to FIGS. 3a and 3b. Hereinafter, the present invention will be explained in more detail with reference to Examples. Examples 1 to 9, Comparative Examples First, the fourth example corresponds to the following Examples and Comparative Examples.
The heating element installation board shown in the figure was created in the following manner. SiO 2 heat storage layer (thickness 5μm) on alumina substrate,
After sequentially forming a ZrB 2 heating resistor layer (800 Å thick) and an aluminum electrode layer (5000 Å thick), heating resistors 23-1, 23-5 with a width of 40 μm and a length of 200 μm are formed by selective etching. was formed.
Also, the lead electrode 21- of the same width is etched.
1, ……, 21-5 and 22-1, ……, 2
2-5 was formed. In addition to the above operations, the heating resistor 23-1,...
..., 23-5, a SiO 2 protective layer (thickness
1μ) was provided by sputtering. and,
The area corresponding to the relay chamber (common liquid chamber) for ink supply indicated by the crossing line in Fig. 4 includes the following table:
The coatings as described in Table 1 and Table 2 below were provided, respectively. Also, apart from these, a glass plate (thickness 1mm)
Then, as shown in FIG. 6, grooves consisting of grooves 30 (width 40 μm, depth 40 μm) of the same number and pitch as the heating resistors and a common liquid chamber 31 are formed by cutting using a micro cutter. A grooved plate 32 was created. Each heating element installation board and grooved plate created in this way are bonded after aligning each heating resistor with the groove, and furthermore, a common liquid chamber 31 from an ink supply section (not shown) is connected. An ink introduction pipe 33 for introducing ink was also connected to complete a recording head block 34 as shown in FIG. 7. Furthermore, a lead board having electrode leads is attached to this block 34, and the lead electrode 2 described above is attached to the block 34.
1-1, ......, 21-5 and 22-1, ...
..., 22-5 were connected to the lead electrodes. Next, as a discharge experimental condition, a rectangular voltage pulse of 40 V was applied to the heating resistor through the electrode lead with a pulse width of 10 μsec and a pulse input period of 200 μsec. Incidentally, the composition of the ink used was 70 parts by weight of water, 29 parts by weight of diethylene glycol, and 1 part by weight of black dye. When an ink ejection experiment was conducted using the above ejection test conditions and ink, as shown in Table 1 below, the Examples obtained superior results in the durability of the recording head compared to the Comparative Examples. It was also excellent in recording performance. The durability of these Examples and Comparative Examples was evaluated based on the number of times an electric pulse could be repeatedly applied to which the ink ejection responded, as follows. A……10 9 times or more Durability evaluation criteria B……10 8 to 10 9 times C……10 5 times or less

【表】【table】

【表】 (注) 比較例では、所定の被膜形成を全く行つてい
ない。
以上の実施例からも、電極上の被膜の介在によ
つて、記録ヘツドの耐久性が格段に向上すること
が判る。 因に、以上の説明に於いて示した発熱体として
は、従来広く感熱記録の分野に於いて用いられる
感熱印字ヘツド(つまり、サーマル・ヘツド)と
ほぼ同様のものも条件次第では適用することがで
きる。それらは、作成方法、発熱抵抗体等の差異
により、厚膜ヘツド、薄膜ヘツド、半導体ヘツド
に分類されるが、本発明においてはそれらの中か
ら適当なものを使用することが可能である。但
し、特に高速、高解像力の記録を行うときは、耐
熱性に優れた薄膜ヘツドを利用するのが望まし
い。 又、本発明に於いて用いる記録用インクは、
水、エタノール等のアルコール、或はトルエン等
を例とする主溶媒に、エチレングリコール等を例
とする湿潤剤、界面活性剤及び各種染料等を溶解
或は分散させて作成される。なお、吐出オリフイ
スを詰らさないためにインクの作成後フイルタで
濾過したり、インク流路中にフイルタを設けたり
する工夫は既存のインクジエツト記録法の場合と
同様に有効なことである。 [発明の効果] 以上詳説したとおり、本発明によれば、構造的
に簡略で、しかも長期に亘つてインクの吐出を安
定的に行なうことができる液体噴射記録ヘツドを
提供することができる。 また、本発明によれば、高速度で良品位の記録
画を与えることができる高性能のマルチアレイ型
式の液体噴射記録ヘツドを提供することもでき
る。
[Table] (Note) In the comparative example, no prescribed film formation was performed.
It can be seen from the above examples that the durability of the recording head is greatly improved by the presence of the coating on the electrodes. Incidentally, as the heating element shown in the above explanation, one that is almost the same as a thermal printing head (that is, a thermal head) conventionally widely used in the field of thermal recording may also be applied depending on the conditions. can. They are classified into thick film heads, thin film heads, and semiconductor heads, depending on the manufacturing method, heating resistor, etc., and it is possible to use any suitable one among them in the present invention. However, especially when recording at high speed and high resolution, it is desirable to use a thin film head with excellent heat resistance. Furthermore, the recording ink used in the present invention is
It is prepared by dissolving or dispersing a wetting agent such as ethylene glycol, a surfactant, various dyes, etc. in a main solvent such as water, alcohol such as ethanol, or toluene. Note that in order to prevent clogging of the ejection orifice, it is effective to filter the ink after it is prepared or to provide a filter in the ink flow path, as in the case of existing inkjet recording methods. [Effects of the Invention] As described in detail above, according to the present invention, it is possible to provide a liquid jet recording head that is structurally simple and capable of stably ejecting ink over a long period of time. Further, according to the present invention, it is possible to provide a high-performance multi-array type liquid jet recording head that can provide high-quality recorded images at high speed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図及び第2図は本発明に係る液体噴射記録
ヘツドの一具体例とその液体噴射原理を説明する
為の模式的斜視図、第3図a及び第3図bは夫々
本発明に係る発熱部と電極との配置形態の例を示
す模式的平面図、第4図及び第5図は共に本発明
の一実施例を説明するための模式的平面図、第6
図及び第7図は夫々本発明の他の実施例を説明す
る為の模式的斜視図である。 図に於いて2は発熱部、4′は液路、5は吐出
オリフイス、8,21−1,………,21−5,
22−1,………,22−5,24,25−1,
………,25−5は電極、9は保護層、11は発
熱抵抗体層、23−1,………,23−5,26
−1,………,26−5は発熱抵抗体、27,2
8はインク流路の領域、30,31は溝、IKは
インクである。
1 and 2 are schematic perspective views for explaining a specific example of a liquid jet recording head according to the present invention and its liquid jet principle, and FIGS. 3a and 3b are respectively according to the present invention. FIGS. 4 and 5 are both schematic plan views showing an example of the arrangement of the heat generating part and the electrodes, and FIGS.
7 and 7 are schematic perspective views for explaining other embodiments of the present invention, respectively. In the figure, 2 is a heat generating part, 4' is a liquid path, 5 is a discharge orifice, 8, 21-1, ......, 21-5,
22-1, ......, 22-5, 24, 25-1,
......, 25-5 is an electrode, 9 is a protective layer, 11 is a heating resistor layer, 23-1, ......, 23-5, 26
-1, ......, 26-5 are heating resistors, 27, 2
8 is an ink flow path area, 30 and 31 are grooves, and IK is ink.

Claims (1)

【特許請求の範囲】[Claims] 1 記録液を吐出する吐出口の複数と、対応する
吐出口毎に設けられ該吐出口に連通する液路と、
対応する液路に設けられ、記録液に熱による状態
変化を生起させ該状態変化に基づいて記録液を前
記吐出口より吐出させて飛翔的液滴を形成するた
めに利用される熱エネルギーを発生する発熱部
と、該発熱部に電気信号を付与するためのリード
電極と、該リード電極上に設けられ前記液路に記
録液を供給するための共通液室と、該共通液室下
のリード電極を覆う様に設けられた有機被膜と、
を有することを特徴とする液体噴射記録ヘツド。
1. A plurality of ejection ports for ejecting recording liquid, and a liquid path provided for each corresponding ejection port and communicating with the ejection port;
A device is provided in a corresponding liquid path and generates thermal energy that is used to cause a state change in the recording liquid due to heat and, based on the state change, cause the recording liquid to be ejected from the ejection port to form flying droplets. a lead electrode for applying an electric signal to the heat generating part; a common liquid chamber provided on the lead electrode for supplying recording liquid to the liquid path; and a lead under the common liquid chamber. An organic film provided to cover the electrode,
A liquid jet recording head comprising:
JP15779579A 1979-12-04 1979-12-04 Liquid drop jet recording device Granted JPS5680477A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP15779579A JPS5680477A (en) 1979-12-04 1979-12-04 Liquid drop jet recording device
JP61289184A JPS62156971A (en) 1979-12-04 1986-12-04 Forming of coated film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15779579A JPS5680477A (en) 1979-12-04 1979-12-04 Liquid drop jet recording device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP61289184A Division JPS62156971A (en) 1979-12-04 1986-12-04 Forming of coated film

Publications (2)

Publication Number Publication Date
JPS5680477A JPS5680477A (en) 1981-07-01
JPS6326708B2 true JPS6326708B2 (en) 1988-05-31

Family

ID=15657444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15779579A Granted JPS5680477A (en) 1979-12-04 1979-12-04 Liquid drop jet recording device

Country Status (1)

Country Link
JP (1) JPS5680477A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833472A (en) * 1981-08-24 1983-02-26 Canon Inc Liquid jet recording head

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199534A (en) * 1975-02-27 1976-09-02 Matsushita Electric Ind Co Ltd
JPS544129A (en) * 1977-06-13 1979-01-12 Ricoh Co Ltd Recording method
JPS5459936A (en) * 1977-10-03 1979-05-15 Canon Inc Recording method and device therefor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199534A (en) * 1975-02-27 1976-09-02 Matsushita Electric Ind Co Ltd
JPS544129A (en) * 1977-06-13 1979-01-12 Ricoh Co Ltd Recording method
JPS5459936A (en) * 1977-10-03 1979-05-15 Canon Inc Recording method and device therefor

Also Published As

Publication number Publication date
JPS5680477A (en) 1981-07-01

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