JPS63243506A - Speed control air pressure circuit for pneumatic cylinder - Google Patents

Speed control air pressure circuit for pneumatic cylinder

Info

Publication number
JPS63243506A
JPS63243506A JP62074085A JP7408587A JPS63243506A JP S63243506 A JPS63243506 A JP S63243506A JP 62074085 A JP62074085 A JP 62074085A JP 7408587 A JP7408587 A JP 7408587A JP S63243506 A JPS63243506 A JP S63243506A
Authority
JP
Japan
Prior art keywords
pneumatic cylinder
air pressure
speed control
control air
pressure circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62074085A
Other languages
Japanese (ja)
Inventor
Naoyuki Tamura
Norio Kanai
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62074085A priority Critical patent/JPS63243506A/en
Publication of JPS63243506A publication Critical patent/JPS63243506A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To restrain the projecting phenomenon of a piston by providing a pressure regulating valve in the exhaust line of an electromagnetic valve which controls the operation of a pneumatic cylinder in the title circuit for the conveyor mechanism in vacuum of a semi-conductor device, etc.
CONSTITUTION: A pressure regulating valve 11 is provided in the exhaust line of an electromagnetic valve 10 which controls the operation of a pneumatic cylinder 5. Thereby, constant pressure is usually maintained in the exhaust line so that the response of a piston to any sudden change of the force direction to the pneumatic cylinder 5 by the change-over of the electromagnetic valve 10 is made slow to restrain any projecting phenomenon.
COPYRIGHT: (C)1988,JPO&Japio
JP62074085A 1987-03-30 1987-03-30 Speed control air pressure circuit for pneumatic cylinder Pending JPS63243506A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62074085A JPS63243506A (en) 1987-03-30 1987-03-30 Speed control air pressure circuit for pneumatic cylinder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62074085A JPS63243506A (en) 1987-03-30 1987-03-30 Speed control air pressure circuit for pneumatic cylinder

Publications (1)

Publication Number Publication Date
JPS63243506A true JPS63243506A (en) 1988-10-11

Family

ID=13536981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62074085A Pending JPS63243506A (en) 1987-03-30 1987-03-30 Speed control air pressure circuit for pneumatic cylinder

Country Status (1)

Country Link
JP (1) JPS63243506A (en)

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