JPS6324259U - - Google Patents

Info

Publication number

JPS6324259U

JPS6324259U JP11854486U JP11854486U JPS6324259U JP S6324259 U JPS6324259 U JP S6324259U JP 11854486 U JP11854486 U JP 11854486U JP 11854486 U JP11854486 U JP 11854486U JP S6324259 U JPS6324259 U JP S6324259U

Authority

JP

Japan

Prior art keywords

pipe

gas

reflective surface

chamber

evaporation apparatus

Prior art date

1986-07-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001704 evaporation Methods 0.000 claims description 2
• 230000008020 evaporation Effects 0.000 claims description 2
• 238000007738 vacuum evaporation Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000000758 substrate Substances 0.000 description 2