JPS63237522A - Alignment - Google Patents

Alignment

Info

Publication number
JPS63237522A
JPS63237522A JP62072699A JP7269987A JPS63237522A JP S63237522 A JPS63237522 A JP S63237522A JP 62072699 A JP62072699 A JP 62072699A JP 7269987 A JP7269987 A JP 7269987A JP S63237522 A JPS63237522 A JP S63237522A
Authority
JP
Japan
Prior art keywords
alignment
substrate
photosensitive layer
reference mark
advance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62072699A
Other languages
English (en)
Other versions
JP2550979B2 (ja
Inventor
Takechika Nishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62072699A priority Critical patent/JP2550979B2/ja
Publication of JPS63237522A publication Critical patent/JPS63237522A/ja
Application granted granted Critical
Publication of JP2550979B2 publication Critical patent/JP2550979B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP62072699A 1987-03-26 1987-03-26 アライメント方法 Expired - Fee Related JP2550979B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62072699A JP2550979B2 (ja) 1987-03-26 1987-03-26 アライメント方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62072699A JP2550979B2 (ja) 1987-03-26 1987-03-26 アライメント方法

Publications (2)

Publication Number Publication Date
JPS63237522A true JPS63237522A (en) 1988-10-04
JP2550979B2 JP2550979B2 (ja) 1996-11-06

Family

ID=13496869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62072699A Expired - Fee Related JP2550979B2 (ja) 1987-03-26 1987-03-26 アライメント方法

Country Status (1)

Country Link
JP (1) JP2550979B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6271919B1 (en) 1998-04-02 2001-08-07 Nec Corporation Semiconductor device and alignment apparatus and alignment method for same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6271919B1 (en) 1998-04-02 2001-08-07 Nec Corporation Semiconductor device and alignment apparatus and alignment method for same

Also Published As

Publication number Publication date
JP2550979B2 (ja) 1996-11-06

Similar Documents

Publication Publication Date Title
JPS6324618A (en) Exposure method
JPH04316312A (en) Method and device for imaging, and device for precisely displacing and positioning object
JPS60149130A (en) Method for pattern detection
JPS60186845A (en) Aligning device of exposure device
JPS61222128A (en) Projection exposure method
JPS6167858A (en) Transferring mask
JPS63237522A (en) Alignment
EP0517923A4 (en) Method of forming minute resist pattern
JPH04291256A (en) Photomask
JPH02130910A (en) Alignment
JPS63286810A (en) Base plate exposing device
KR970012019A (ko) 노광방법 및 장치
JPS62200724A (en) Projection and exposure device
JPH02251851A (en) Photomask
JPS6276622A (en) Method and device for reduced projection-type alignment
JPS6381817A (en) Projection exposure method
JPH0298123A (en) Mask for x-ray exposure use
JPS5491183A (en) Production of semiconductor device
JPS62286245A (en) Inspection of exposed substrate
JPS6214102A (en) Production of color filter
JPH0356965A (en) Exposing device
JPS62200725A (en) Projection and exposure device
JPS62115164A (en) Method and device for forming pattern
JPH0355865A (en) Manufacture of semiconductor device
JPS6425411A (en) Semiconductor device

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees