JPS63228979A - Ultrasonic driving gear - Google Patents

Ultrasonic driving gear

Info

Publication number
JPS63228979A
JPS63228979A JP62059894A JP5989487A JPS63228979A JP S63228979 A JPS63228979 A JP S63228979A JP 62059894 A JP62059894 A JP 62059894A JP 5989487 A JP5989487 A JP 5989487A JP S63228979 A JPS63228979 A JP S63228979A
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
ring
cut
traveling wave
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62059894A
Other languages
Japanese (ja)
Inventor
Keisuke Honda
本多 敬介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Electronics Co Ltd
Original Assignee
Honda Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Electronics Co Ltd filed Critical Honda Electronics Co Ltd
Priority to JP62059894A priority Critical patent/JPS63228979A/en
Publication of JPS63228979A publication Critical patent/JPS63228979A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/002Driving devices, e.g. vibrators using only longitudinal or radial modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices

Abstract

PURPOSE:To facilitate manufacture and reduce the cost, by providing a part of a ring with a cut-off section to form a ring-formed piezoelectric oscillator, and by applying an AC field in the direction of the thickness to generate a traveling wave. CONSTITUTION:A ring-formed piezoelectric oscillator 4 is provided with a cut-off section 5 formed to cut off a part of the ring with a slight void, and on both the surfaces, electrodes 6-7 are respectively arranged, and polarization is performed in the direction of the thickness. When the AC field of specified frequency is applied to the oscillator 4 from an oscillating unit, then traveling waves in the directions A(B) of arrow heads are generated near the cut-off section. An ultrasonic wave driving gear is composed of said oscillator 4, and the driven unit 11 of a rotary body supporting a rotary shaft 10 on the side surface 9 near the cut-off section 5 with a bearing or the like. Then, the driven unit 11 can be rotated in the forward or reverse direction.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、リングを微小間隙で切断したリング状の圧電
体振動子によって被駆動体を駆動する超音波駆動装置に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an ultrasonic drive device that drives a driven body using a ring-shaped piezoelectric vibrator, which is formed by cutting a ring with a minute gap.

従来技術 現在提案されている超音波モータは、円環形圧電セラミ
ックの片面に2組の電極群を接着し、それぞれの電極群
によって励振される定在波が位置的に90″ずれるよう
に電極を配置し、さらにこれら2組の電極群に印加する
交流電界が時間的に90’位相差がある2組の発振器を
それぞれ接続している。
Prior Art The currently proposed ultrasonic motor has two sets of electrodes bonded to one side of a circular piezoelectric ceramic, and the electrodes are arranged so that the standing waves excited by each electrode set are shifted by 90''. Furthermore, two sets of oscillators are connected to each other, and the alternating current electric fields applied to these two sets of electrode groups have a temporal phase difference of 90'.

このように構成した従来の超音波モータは、2組の発振
器からそれぞれの電極群に交流電界を印加することによ
って円環形圧電セラミックの周囲の表面に90″位相が
ずれた2つの定在波が発生し、この2つの定在波が合成
された進行波が発生する。従って、円環形圧電セラミッ
クの上に接着された櫛形の振動体の上に円環形の移動体
を載置して接触を強くすると、移動体が進行波によって
移動される。
The conventional ultrasonic motor configured in this way generates two standing waves with a phase shift of 90'' on the surface around the annular piezoelectric ceramic by applying an alternating electric field from two sets of oscillators to each electrode group. A traveling wave is generated by combining these two standing waves.Therefore, a toroidal moving body is placed on top of the comb-shaped vibrating body bonded to the toroidal piezoelectric ceramic to make contact. If it is strong, the moving object will be moved by the traveling wave.

光胆□友邂決しよう仁方且販應− しかしながら、この従来の超音波モータでは、複数の電
極と、これらの電極に交流電界を印加する2組の発振器
が必要であり、電極の構成が複雑で、また振動体の構成
も複雑であり、コストが高くなるという問題があった。
However, this conventional ultrasonic motor requires multiple electrodes and two sets of oscillators to apply an alternating electric field to these electrodes, making the electrode configuration difficult. It is complicated, and the structure of the vibrating body is also complicated, resulting in a problem of high cost.

澗題点をWL決−肢…手役 本発明は、上記問題点を解決するために、リングの一部
に微小間隙の切断部を設けたリング状の圧電体振動子の
厚み方向に交流電界を印加することにより、上記圧電体
振動子の」−記切断部の近傍に、上記圧電体振動子の側
面から上記切断部に向う進行波または上記切断部から上
記側面方向に向う進行波を発生させ、上記圧電体振動子
の上記切断部の近傍に被駆動体を組合わせることを特徴
とする。
In order to solve the above-mentioned problems, the present invention applies an alternating current electric field in the thickness direction of a ring-shaped piezoelectric vibrator in which a part of the ring is cut with a minute gap. By applying , a traveling wave from the side surface of the piezoelectric vibrator toward the cutting section or a traveling wave from the cutting section toward the side surface is generated in the vicinity of the cutting section of the piezoelectric vibrator. and a driven body is combined in the vicinity of the cut portion of the piezoelectric vibrator.

憔叩 本発明によれば、リング状の圧電体振動子の一部を微小
間隙で切断することによる切断部を設けたリング状の圧
電体振動子の厚み方向に、2つの周波数に設定した交流
電界を印加すると、圧電体振動子の切断部の近傍に、1
つの周波数では圧電体振動子の側面及び上下面から切断
部へ移動する進行波が発生し、また他の1つの周波数で
は、切断部から側面及び上下面方向へ移動する進行波が
発生するので、圧電体振動子の切断部の近傍に被駆動体
を組合わせることにより被駆動体を駆動させることがで
きる。
According to the present invention, an alternating current set at two frequencies is applied in the thickness direction of a ring-shaped piezoelectric vibrator in which a cut portion is provided by cutting a part of the ring-shaped piezoelectric vibrator with a minute gap. When an electric field is applied, 1
At one frequency, a traveling wave that moves from the side and upper and lower surfaces of the piezoelectric vibrator toward the cutting section is generated, and at the other frequency, a traveling wave that moves from the cutting section toward the side and upper and lower surfaces is generated. By combining the driven body near the cut portion of the piezoelectric vibrator, the driven body can be driven.

宍凄1殊 第1図は、リング状の圧電体振動子の斜視図及び平面図
で、第1−図(a)においてリング状の圧電体振動子1
は厚み方向に分極され、またこの圧電体振動子1の上下
面に電極2,3が設けられている。この圧電体振動子1
に電極2.3を介して交流電界を印加すると、第1図(
b)の矢印Aで示すようにリングの両面で外周1aから
内周1bに向う進行波が発生し、また側面では第1図(
a)の矢印Bで示すように電極2.3側から内側に向う
進行波が発生することを本発明者が発見した。
Figure 1 is a perspective view and a plan view of a ring-shaped piezoelectric vibrator.
is polarized in the thickness direction, and electrodes 2 and 3 are provided on the upper and lower surfaces of the piezoelectric vibrator 1. This piezoelectric vibrator 1
When an alternating current electric field is applied through electrode 2.3 to
As shown by arrow A in b), traveling waves are generated from the outer circumference 1a to the inner circumference 1b on both sides of the ring, and on the side surfaces, as shown in Fig. 1 (
The inventor discovered that a traveling wave moving inward from the electrode 2.3 side is generated as shown by arrow B in a).

しかし、この圧電体振動子1では、その側面及び上下面
に円周方向に移動する進行波は発生しなし)。
However, in this piezoelectric vibrator 1, no traveling waves moving in the circumferential direction are generated on the side and upper and lower surfaces.

第2図は、本発明で使用する圧電体振動子の平面図及び
側面図で、第2図(a)においてリング状の圧電体振動
子4はリングの一部を微小間隙で切断するようにして形
成した切断部5が設けられ、また圧電体振動子4の両面
にそれぞれ電極6.7が設けられ、圧電体振動子4は厚
み方向に分極されている。
FIG. 2 is a plan view and a side view of a piezoelectric vibrator used in the present invention. In FIG. 2(a), a ring-shaped piezoelectric vibrator 4 is cut in a part with a minute gap. In addition, electrodes 6 and 7 are provided on both sides of the piezoelectric vibrator 4, and the piezoelectric vibrator 4 is polarized in the thickness direction.

このように構成した圧電体振動子4に電極6.7を介し
て発振器よりある所定の周波数の交流電界を印加すると
、切断部5の近傍に、圧電体振動子4の側面8.9から
切断部5に向って進行する矢印A゛に示すような進行波
が発生し、また上記周波数と異なった所定の周波数の交
流電界を電極6.7を介して圧電体振動子4に印加する
と、矢印Bで示すように切断部5から側面8.9に向っ
て移動する進行波が発生していることを発見した。なお
、第2図(b)に示すように圧電体振動子4の切断部5
の近傍の上下面にもそれぞれの周波数で第2図(a)の
矢印AまたはBと同様に矢印CまたはDに示す進行波が
発生しており、また圧電体振動子4の切断部5の近傍以
外の電極面6.7には、第1図(b)の矢印Aで示すリ
ングの内周に向う進行波が発生していることを発見した
When an alternating current electric field of a certain predetermined frequency is applied from an oscillator to the piezoelectric vibrator 4 configured in this way through the electrode 6.7, a cut occurs near the cutting portion 5 from the side surface 8.9 of the piezoelectric vibrator 4. A traveling wave as shown by the arrow A' is generated, which travels toward the section 5, and when an AC electric field with a predetermined frequency different from the above frequency is applied to the piezoelectric vibrator 4 via the electrode 6.7, the wave shown by the arrow A' is generated. It was discovered that a traveling wave moving from the cut portion 5 toward the side surface 8.9 was generated as shown in B. Note that, as shown in FIG. 2(b), the cut portion 5 of the piezoelectric vibrator 4
Similarly to arrows A and B in FIG. 2(a), traveling waves shown by arrows C or D are generated on the upper and lower surfaces near the piezoelectric vibrator 4 at respective frequencies. It was discovered that a traveling wave toward the inner periphery of the ring, indicated by arrow A in FIG. 1(b), was generated on the electrode surface 6.7 other than in the vicinity.

この進行波が発生する原理はあまり定かセはないが、圧
電体振動子4に厚み方向の振動が発生する時、その振動
と90°位相がずれた外郭振動が発生する。ここで、圧
電体振動子4に切断部5があるため、厚み振動と外郭振
動が複雑に関係して音叉的な振動を発生することにより
、圧電体振動子4の切断部5の近傍に進行波が発生する
ものと考えられる。
Although the principle by which this traveling wave is generated is not very clear, when vibration in the thickness direction occurs in the piezoelectric vibrator 4, an outer vibration that is out of phase with the vibration by 90 degrees is generated. Here, since the piezoelectric vibrator 4 has the cut portion 5, the thickness vibration and the outer shell vibration are intricately related to generate tuning fork-like vibrations, which proceed to the vicinity of the cut portion 5 of the piezoelectric vibrator 4. It is thought that waves are generated.

第3図は、本発明の実施例の超音波駆動装置の斜視図で
、前述の圧電体振動子4の切断部5の近傍の側面9に回
転軸10がベアリング等で支持された回転体からなる被
駆動体11が組合わされている。
FIG. 3 is a perspective view of an ultrasonic driving device according to an embodiment of the present invention, in which a rotary shaft 10 is mounted on a side surface 9 near the cutting portion 5 of the piezoelectric vibrator 4 described above, and is mounted on a rotating body supported by a bearing or the like. The driven bodies 11 are combined.

このように構成した本実施例の超音波駆動装置では、圧
電体振動子4に印加する交流電界の周波数を所定の2つ
の周波数にそれぞれ設定することによって、被駆動体1
1を正転または逆転させることができる。
In the ultrasonic drive device of this embodiment configured as described above, the frequency of the alternating current electric field applied to the piezoelectric vibrator 4 is set to two predetermined frequencies.
1 can be rotated forward or reverse.

本実施例の超音波駆動装置は、】っの発振器から円板状
の圧電体振動子1の厚み方向に交流電界を印加する簡単
な構成であるため、製造が容易であり、小型のモータか
ら大型のモータまで容易に製造することができる。
The ultrasonic driving device of this embodiment has a simple configuration in which an alternating current electric field is applied in the thickness direction of the disc-shaped piezoelectric vibrator 1 from the oscillator, and therefore it is easy to manufacture and can be easily manufactured using a small motor. Even large motors can be easily manufactured.

第4図は、本発明の他の実施例の超音波駆動装置の平面
図で、圧電体振動子4の切断部5の近傍の側面9に棒状
の被駆動体11が係合されている。なお、この棒状の被
駆動体11はベアリング等で軸方向に摺動できるように
支持されている。
FIG. 4 is a plan view of an ultrasonic driving device according to another embodiment of the present invention, in which a rod-shaped driven body 11 is engaged with a side surface 9 of a piezoelectric vibrator 4 near a cutting portion 5. Note that this rod-shaped driven body 11 is supported by a bearing or the like so that it can slide in the axial direction.

このように構成した本実施例の超音波駆動装置では、2
つの周波数にそれぞれ設定することにより、棒状の被駆
動体11を図の左右に動かすことができるので、リニア
モータとして使用することができる。なお、本実施例に
おいては、被駆動体11を駆動するトルクに応じて、圧
電体振動子4を2個以上棒状の被駆動体11に設けても
よい。
In the ultrasonic drive device of this embodiment configured in this way, 2
By setting the two frequencies, it is possible to move the rod-shaped driven body 11 to the left and right in the figure, so it can be used as a linear motor. In this embodiment, two or more piezoelectric vibrators 4 may be provided on the rod-shaped driven body 11 depending on the torque for driving the driven body 11.

このように上記実施例では、リング状の圧電体振動子4
の切断部5の近傍の側面9に発生する進行波によって被
駆動体11を駆動するようにしているが、圧電体振動子
4の切断部5の側面8及び上下面に被駆動体11を係合
させても、被駆動体11を同様に駆動することができる
。なお、圧電体振動子4の上下面に被駆動体11を係合
させる場合は、電極6と一体または別体の耐摩耗性の接
触板を設けて電極が摩耗しないようにすればよい。
In this way, in the above embodiment, the ring-shaped piezoelectric vibrator 4
The driven body 11 is driven by a traveling wave generated on the side surface 9 near the cutting section 5 of the piezoelectric vibrator 4. Even if they are combined, the driven body 11 can be driven in the same way. Note that when the driven body 11 is to be engaged with the upper and lower surfaces of the piezoelectric vibrator 4, wear-resistant contact plates may be provided integrally with or separate from the electrode 6 to prevent the electrode from being worn.

発明の舛果 以上の説明から明らかなように、本発明は、リングの一
部に微小間隙の切断部を設けたリング状の圧電体振動子
の厚み方向に2つの予め決められた周波数の交流電界を
かけることにより、圧電体振動子の切断部の近傍に発生
するまたは切断部から側面及び上下面から切断部方向へ
移動する進行波によって、被駆動体を駆動する簡単な構
成であるので、製造が容易で、コストを安くすることが
できるばかりでなく、トルクを大きく取ることができ、
また性能の良い超音波駆動装置を提供することができる
という利点がある。
Results of the Invention As is clear from the above description, the present invention provides two alternating currents of predetermined frequencies in the thickness direction of a ring-shaped piezoelectric vibrator in which a part of the ring has a cut portion with a minute gap. It has a simple configuration in which the driven body is driven by a traveling wave generated near the cutting part of the piezoelectric vibrator or moving from the side and upper and lower surfaces toward the cutting part by applying an electric field. Not only is it easy to manufacture and can reduce costs, but it can also provide a large amount of torque.
There is also the advantage that an ultrasonic drive device with good performance can be provided.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はリング状の圧電体振動子の斜視図及び平面図、
第2図は本発明で使用するリング状の圧電体振動子の斜
視図及び平面図、第3図の本発明の実施例の超音波駆動
装置の斜視図、第4図は本発明の他の実施例の超音波駆
動装置の斜視図である。 4・・・圧電体振動子、5・・・切断部、6.7・・・
電極、8.9・・・側面、10・・・回転軸、11・・
・被駆動体。
FIG. 1 is a perspective view and a plan view of a ring-shaped piezoelectric vibrator,
2 is a perspective view and a plan view of a ring-shaped piezoelectric vibrator used in the present invention, FIG. 3 is a perspective view of an ultrasonic drive device according to an embodiment of the present invention, and FIG. 4 is a perspective view of another embodiment of the present invention. FIG. 1 is a perspective view of an ultrasonic driving device according to an embodiment. 4... Piezoelectric vibrator, 5... Cutting section, 6.7...
Electrode, 8.9... Side surface, 10... Rotating shaft, 11...
- Driven object.

Claims (3)

【特許請求の範囲】[Claims] (1)リングの一部に微小間隙の切断部を設けたリング
状の圧電体振動子の厚み方向に交流電界を印加すること
により、上記圧電体振動子の上記切断部の近傍に、上記
圧電体振動子の側面から上記切断部に向う進行波または
上記切断部から上記側面方向に向う進行波を発生させ、
上記圧電体振動子の上記切断部の近傍に被駆動体を組合
わせることを特徴とする超音波駆動装置。
(1) By applying an alternating current electric field in the thickness direction of a ring-shaped piezoelectric vibrator in which a cut portion with a minute gap is provided in a part of the ring, the piezoelectric vibrator is placed near the cut portion of the piezoelectric vibrator. Generating a traveling wave from a side surface of the body vibrator toward the cutting portion or a traveling wave traveling from the cutting portion toward the side surface,
An ultrasonic driving device characterized in that a driven body is combined in the vicinity of the cutting portion of the piezoelectric vibrator.
(2)複数個の上記圧電体振動子により上記被駆動体を
駆動することを特徴とする特許請求の範囲第1項記載の
超音波駆動装置。
(2) The ultrasonic driving device according to claim 1, wherein the driven body is driven by a plurality of the piezoelectric vibrators.
(3)上記交流電界の周波数を所定の2つの周波数に設
定することにより、一方の周波数で上記圧電体振動子の
切断部の方向へ、他方の周波数で切断部から上記側面方
向へ上記進行波が発生するようにすることを特徴とする
特許請求の範囲第1項記載の超音波駆動装置。
(3) By setting the frequency of the alternating current electric field to two predetermined frequencies, the traveling wave moves toward the cut section of the piezoelectric vibrator at one frequency and from the cut section toward the side surface at the other frequency. 2. The ultrasonic driving device according to claim 1, wherein the ultrasonic driving device is configured to generate the following.
JP62059894A 1987-03-14 1987-03-14 Ultrasonic driving gear Pending JPS63228979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62059894A JPS63228979A (en) 1987-03-14 1987-03-14 Ultrasonic driving gear

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62059894A JPS63228979A (en) 1987-03-14 1987-03-14 Ultrasonic driving gear

Publications (1)

Publication Number Publication Date
JPS63228979A true JPS63228979A (en) 1988-09-22

Family

ID=13126277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62059894A Pending JPS63228979A (en) 1987-03-14 1987-03-14 Ultrasonic driving gear

Country Status (1)

Country Link
JP (1) JPS63228979A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216313A (en) * 1988-12-16 1993-06-01 Alps Electric Co., Ltd. Ultrasonic wave linear motor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5216313A (en) * 1988-12-16 1993-06-01 Alps Electric Co., Ltd. Ultrasonic wave linear motor

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