JPS6322472U - - Google Patents

Info

Publication number
JPS6322472U
JPS6322472U JP11529886U JP11529886U JPS6322472U JP S6322472 U JPS6322472 U JP S6322472U JP 11529886 U JP11529886 U JP 11529886U JP 11529886 U JP11529886 U JP 11529886U JP S6322472 U JPS6322472 U JP S6322472U
Authority
JP
Japan
Prior art keywords
ports
cylinder
valve
pistons
valve bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11529886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0440052Y2 (US08063081-20111122-C00115.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11529886U priority Critical patent/JPH0440052Y2/ja
Publication of JPS6322472U publication Critical patent/JPS6322472U/ja
Application granted granted Critical
Publication of JPH0440052Y2 publication Critical patent/JPH0440052Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP11529886U 1986-07-29 1986-07-29 Expired JPH0440052Y2 (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11529886U JPH0440052Y2 (US08063081-20111122-C00115.png) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11529886U JPH0440052Y2 (US08063081-20111122-C00115.png) 1986-07-29 1986-07-29

Publications (2)

Publication Number Publication Date
JPS6322472U true JPS6322472U (US08063081-20111122-C00115.png) 1988-02-15
JPH0440052Y2 JPH0440052Y2 (US08063081-20111122-C00115.png) 1992-09-18

Family

ID=30998815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11529886U Expired JPH0440052Y2 (US08063081-20111122-C00115.png) 1986-07-29 1986-07-29

Country Status (1)

Country Link
JP (1) JPH0440052Y2 (US08063081-20111122-C00115.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009122762A1 (ja) * 2008-03-31 2009-10-08 東京エレクトロン株式会社 三方弁

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009122762A1 (ja) * 2008-03-31 2009-10-08 東京エレクトロン株式会社 三方弁

Also Published As

Publication number Publication date
JPH0440052Y2 (US08063081-20111122-C00115.png) 1992-09-18

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