JPS6322291A - Sample conveyor - Google Patents
Sample conveyorInfo
- Publication number
- JPS6322291A JPS6322291A JP61163644A JP16364486A JPS6322291A JP S6322291 A JPS6322291 A JP S6322291A JP 61163644 A JP61163644 A JP 61163644A JP 16364486 A JP16364486 A JP 16364486A JP S6322291 A JPS6322291 A JP S6322291A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- flexible member
- holding
- fork
- holding means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 9
- 230000007257 malfunction Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、試料搬送装置に係り、特に試料を試料保持手
段着こ保持して搬送する試料搬送装置に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a sample transport device, and more particularly to a sample transport device for transporting a sample while holding it in a sample holding means.
試料を試料保持手段に保持して搬送する試料搬送装置と
しては、試料を機械的に把持して搬送する装置や、試料
をすくい保持して搬送する装置や、試料を吸着、例えば
、真空吸着して搬送する装置等が知られている。なお、
この種の装置として関連するものには、例えば、特開昭
５７−９０９５６号、特開昭５９−５０５３８号等が挙
げられる。Sample transport devices that hold the sample in a sample holding means and transport it include devices that mechanically grip and transport the sample, devices that scoop and transport the sample, and devices that suck the sample, such as vacuum suction. There are known devices for transporting materials. In addition,
Related devices of this type include, for example, Japanese Patent Laid-Open Nos. 57-90956 and 59-50538.
上記従来技術では、試料保持手段での試料の保持を検出
するといった認識を有していないため、空搬送等の誤動
作を生じたり、試料保持手段と他の手段との間での試料
の受は渡しが不確実なものとなったりするといった問題
があった。The above-mentioned conventional technology does not recognize that the holding of the sample in the sample holding means is detected, so malfunctions such as empty conveyance may occur, or the sample may not be received between the sample holding means and other means. There were problems such as the delivery being uncertain.
本発明の目的は、試料保持手段における試料の保持有無
を確実に検出することで、上記問題を解決できる試料搬
送装置を提係することにある。An object of the present invention is to provide a sample transport device that can solve the above problem by reliably detecting whether or not a sample is held in the sample holding means.
上記目的は、試料搬送装置を、試料を保持する試料保持
手段と、該試料保持手段を移動させる駆動手段と、前記
試料を検出する試料検出手段とを具備し、該試料検出手
段の試料検出素子を前記試料保持手段に設けたものとす
ること番こより、達成される。The above object is to provide a sample transport device including a sample holding means for holding a sample, a driving means for moving the sample holding means, and a sample detecting means for detecting the sample, and a sample detecting element of the sample detecting means. This is achieved by providing the sample holding means with:
試料保持手段で試料を保持した場合、例えば、試料の保
持により生じる加圧力により試料検出素子がＯＮして試
料検出手段により試料検出手段での試料保持部が検出さ
れる。一方、試料保持手段で試料を保持していない場合
、上記加圧力は生ぜず、このため、試料検出素子はＯＦ
Ｆ状態にあり試料検出手段により試料保持手段での試料
保持部が検出される。When a sample is held by the sample holding means, for example, the sample detecting element is turned on by the pressure generated by holding the sample, and the sample holding portion of the sample detecting means is detected by the sample detecting means. On the other hand, when the sample holding means does not hold the sample, the above-mentioned pressing force is not generated, and therefore the sample detection element is OF
In state F, the sample holding portion of the sample holding means is detected by the sample detection means.
本発明の一実施例を図面により説明する。 An embodiment of the present invention will be described with reference to the drawings.
図面で、試料を検出する試料検出手段の試料検出素子１
０は、この場合、端部が略り字型に折曲され可撓部材１
１と、接点ソを有する固定部材１３とで構成されている
。なお、可撓部材１１と固定部材１３とは電気良導体で
形成されている。In the drawing, a sample detection element 1 of a sample detection means for detecting a sample
In this case, 0 is a flexible member 1 whose end is bent into an abbreviated shape.
1 and a fixing member 13 having a contact point. Note that the flexible member 11 and the fixed member 13 are made of a good electrical conductor.
図面で、試料を保持する試料保持手段は、この場合、試
料をすくい保持するフォーク団を有している。フォーク
美の試料保持部には、可撓部材１１の端部が挿通可能な
孔のが穿設されている。なお、試料保持手段は駆動手段
（図示省略）で移動させられる。In the drawing, the sample holding means for holding the sample has in this case a fork group for scooping and holding the sample. The sample holder of the fork has a hole through which the end of the flexible member 11 can be inserted. Note that the sample holding means is moved by a driving means (not shown).
図面で、可依部材１１ｉよ、フォーク印の下面に対応し
た位置で、かつ、端部を７オーク加の孔２１に挿通した
状態で、電気絶縁材（資）を介して片持ち支持されてい
る。固定部材１３は、可撓部材１１の上面で、かつ、フ
ォーク加の下面暑こ対応した位置で設けられている。フ
ォークＩの試料保持部に試料がない状態で、可撓部材１
１の端部はフォーク加の試料保持部表面より突出し、ま
た、固定部材１３の接点稔には、可撓部材１３の上面が
当接している。可撓部材１１と固定部材１３とは、例え
ば、試料検出手段を構成する試料検出器（含む電源）（
図示省略）にそれぞれ電気的に接続されている。In the drawing, the flexible member 11i is supported on a cantilever via an electrical insulating material at a position corresponding to the lower surface of the fork mark and with its end inserted into the hole 21 of the 7 oak hole. There is. The fixing member 13 is provided on the upper surface of the flexible member 11 and at a position corresponding to the lower surface of the fork. When there is no sample in the sample holding part of the fork I, the flexible member 1
The end of the flexible member 1 protrudes from the surface of the sample holding portion of the fork, and the upper surface of the flexible member 13 is in contact with the contact point of the fixed member 13. The flexible member 11 and the fixed member 13 are, for example, a sample detector (including a power source) (
(not shown) are electrically connected to each other.
図面で、フォーク（９）の試料保持部に半導体素子基板
やディスク等の試料物が他の手段（図示省略）より渡さ
れ保持される。この状態で、試料４０の裏面は、可撓部
材１１の端部に当接し、試料物の自重により可撓部材１
１は、２点鎖線で示すように液形させられる。この変形
番こより、可撓部材１１と接点丘との導通は断たれ、こ
れにより、フォーク加の試料保持部に試料（９）がある
ことが、試料検出器で検出される。一方、フォークＩの
試料保持部の試料物が他の手段に渡されると、可撓部材
１１は、実線で示す元の状態に復帰する。この復帰で可
撓部材１１と接点社とは再び導通し、これにより、フォ
ークＩの試料保持部に試料（５）がないことが、試料検
出器で検出される。In the drawing, a sample object such as a semiconductor element substrate or a disk is transferred and held by another means (not shown) to the sample holding portion of the fork (9). In this state, the back surface of the sample 40 comes into contact with the end of the flexible member 11, and due to the weight of the sample, the flexible member 1
1 is made into a liquid form as shown by the two-dot chain line. As a result of this deformation, the conduction between the flexible member 11 and the contact hill is broken, and the sample detector detects that the sample (9) is present in the sample holder of the fork. On the other hand, when the sample in the sample holder of the fork I is transferred to another means, the flexible member 11 returns to its original state as shown by the solid line. With this return, the flexible member 11 and the contact point are electrically connected again, and thereby, the sample detector detects that the sample (5) is not present in the sample holding portion of the fork I.
本実施例では、フォークの試料保持部着こおける試料の
保持有無を確実に検出できるので、空搬送等の誤動作を
防止でき、フォークと他の手段との間での試料の受は渡
しを確実なものとすることができる。In this example, since it is possible to reliably detect whether or not a sample is held in the sample holding section of the fork, malfunctions such as empty conveyance can be prevented, and the transfer of the sample between the fork and other means is ensured. It can be made into something.
本実施例では、可撓部材と接点との導通をフォークの試
料保持部■こ試料がない場合とるようにしているが、こ
の逆であっても勿論良い。また、試料検出素子としては
、試料の自重により作動する他の素子でも良（、更（こ
、非接触検出素子であっても良い。In this embodiment, the flexible member and the contact point are electrically connected when there is no sample in the sample holding portion of the fork, but the reverse may of course be used. Further, the sample detection element may be any other element that operates by the weight of the sample (or even a non-contact detection element).
本発明によれば、試料保持手段における試料の保持有無
を確実１こ検出できるので、空搬送等の誤動作を防止で
きると共に、試料保持手段と池の手段との間での試料の
受は渡しを確実なものとすることができるという効果が
ある。According to the present invention, since it is possible to reliably detect whether or not a sample is held in the sample holding means, it is possible to prevent malfunctions such as empty conveyance, and it is possible to prevent the sample from being transferred between the sample holding means and the pond means. This has the effect of making it more reliable.
図面は、本発明の一実施例の試料搬送装置の要部断面図
である。The drawing is a sectional view of a main part of a sample transport device according to an embodiment of the present invention.
Claims (1)
移動させる駆動手段と、前記試料を検出する試料検出手
段とを具備し、該試料検出手段の試料検出素子を前記試
料保持手段に設けたことを特徴とする試料搬送装置。1. A sample holding means for holding a sample, a driving means for moving the sample holding means, and a sample detection means for detecting the sample, and a sample detection element of the sample detection means is provided in the sample holding means. A sample transport device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61163644A JPS6322291A (en) | 1986-07-14 | 1986-07-14 | Sample conveyor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61163644A JPS6322291A (en) | 1986-07-14 | 1986-07-14 | Sample conveyor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6322291A true JPS6322291A (en) | 1988-01-29 |
Family
ID=15777864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61163644A Pending JPS6322291A (en) | 1986-07-14 | 1986-07-14 | Sample conveyor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6322291A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0591548U (en) * | 1992-05-12 | 1993-12-14 | 千代田株式会社 | Wiper |
-
1986
- 1986-07-14 JP JP61163644A patent/JPS6322291A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0591548U (en) * | 1992-05-12 | 1993-12-14 | 千代田株式会社 | Wiper |
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