JPS6321930U - - Google Patents

Info

Publication number
JPS6321930U
JPS6321930U JP11488786U JP11488786U JPS6321930U JP S6321930 U JPS6321930 U JP S6321930U JP 11488786 U JP11488786 U JP 11488786U JP 11488786 U JP11488786 U JP 11488786U JP S6321930 U JPS6321930 U JP S6321930U
Authority
JP
Japan
Prior art keywords
reduction
plane
utility
model registration
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11488786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11488786U priority Critical patent/JPS6321930U/ja
Publication of JPS6321930U publication Critical patent/JPS6321930U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Variable Magnification In Projection-Type Copying Machines (AREA)
JP11488786U 1986-07-25 1986-07-25 Pending JPS6321930U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11488786U JPS6321930U (US07709020-20100504-C00041.png) 1986-07-25 1986-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11488786U JPS6321930U (US07709020-20100504-C00041.png) 1986-07-25 1986-07-25

Publications (1)

Publication Number Publication Date
JPS6321930U true JPS6321930U (US07709020-20100504-C00041.png) 1988-02-13

Family

ID=30998034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11488786U Pending JPS6321930U (US07709020-20100504-C00041.png) 1986-07-25 1986-07-25

Country Status (1)

Country Link
JP (1) JPS6321930U (US07709020-20100504-C00041.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48102646A (US07709020-20100504-C00041.png) * 1972-04-11 1973-12-24
JPS58122541A (ja) * 1982-01-18 1983-07-21 Hitachi Ltd 投影露光装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48102646A (US07709020-20100504-C00041.png) * 1972-04-11 1973-12-24
JPS58122541A (ja) * 1982-01-18 1983-07-21 Hitachi Ltd 投影露光装置

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