JPS6321557U - - Google Patents

Info

Publication number
JPS6321557U
JPS6321557U JP1986115193U JP11519386U JPS6321557U JP S6321557 U JPS6321557 U JP S6321557U JP 1986115193 U JP1986115193 U JP 1986115193U JP 11519386 U JP11519386 U JP 11519386U JP S6321557 U JPS6321557 U JP S6321557U
Authority
JP
Japan
Prior art keywords
grooves
surface plate
line width
grindstone
large number
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986115193U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986115193U priority Critical patent/JPS6321557U/ja
Publication of JPS6321557U publication Critical patent/JPS6321557U/ja
Pending legal-status Critical Current

Links

JP1986115193U 1986-07-29 1986-07-29 Pending JPS6321557U (US08063081-20111122-C00115.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986115193U JPS6321557U (US08063081-20111122-C00115.png) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986115193U JPS6321557U (US08063081-20111122-C00115.png) 1986-07-29 1986-07-29

Publications (1)

Publication Number Publication Date
JPS6321557U true JPS6321557U (US08063081-20111122-C00115.png) 1988-02-12

Family

ID=30998614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986115193U Pending JPS6321557U (US08063081-20111122-C00115.png) 1986-07-29 1986-07-29

Country Status (1)

Country Link
JP (1) JPS6321557U (US08063081-20111122-C00115.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04129669A (ja) * 1990-09-19 1992-04-30 Mitsubishi Materials Corp ウェーハの超精密研磨方法及び研磨装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6119560A (ja) * 1984-07-05 1986-01-28 Matsushita Electric Ind Co Ltd 研摩定盤装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6119560A (ja) * 1984-07-05 1986-01-28 Matsushita Electric Ind Co Ltd 研摩定盤装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04129669A (ja) * 1990-09-19 1992-04-30 Mitsubishi Materials Corp ウェーハの超精密研磨方法及び研磨装置

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