JPS632087B2 - - Google Patents
Info
- Publication number
- JPS632087B2 JPS632087B2 JP57193067A JP19306782A JPS632087B2 JP S632087 B2 JPS632087 B2 JP S632087B2 JP 57193067 A JP57193067 A JP 57193067A JP 19306782 A JP19306782 A JP 19306782A JP S632087 B2 JPS632087 B2 JP S632087B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical axis
- catadioptric
- optical system
- incident
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19306782A JPS5983116A (ja) | 1982-11-02 | 1982-11-02 | 光学系の調整装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19306782A JPS5983116A (ja) | 1982-11-02 | 1982-11-02 | 光学系の調整装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5983116A JPS5983116A (ja) | 1984-05-14 |
| JPS632087B2 true JPS632087B2 (forum.php) | 1988-01-16 |
Family
ID=16301649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19306782A Granted JPS5983116A (ja) | 1982-11-02 | 1982-11-02 | 光学系の調整装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5983116A (forum.php) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0512753Y2 (forum.php) * | 1986-09-30 | 1993-04-02 | ||
| CN104296654B (zh) * | 2014-09-26 | 2017-06-09 | 中国科学院光电研究院 | 激光跟踪仪位置探测器零位安装误差的检测装置和方法 |
| CN117073586B (zh) * | 2023-10-17 | 2024-01-09 | 青岛迈朗格智能制造有限公司 | 一种同轴双轴转台机械轴平行度检测装置及方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS522623B2 (forum.php) * | 1972-02-08 | 1977-01-22 | ||
| JPS567246A (en) * | 1979-06-25 | 1981-01-24 | Olympus Optical Co Ltd | Method and unit for focus detection |
-
1982
- 1982-11-02 JP JP19306782A patent/JPS5983116A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5983116A (ja) | 1984-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4356392A (en) | Optical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed | |
| US4207467A (en) | Film measuring apparatus and method | |
| JPH0363001B2 (forum.php) | ||
| CN110793756A (zh) | 一种基于偏振分光的反射望远镜光轴监测的光校装置 | |
| CN1155797C (zh) | 椭圆计-测量装置 | |
| JP4732569B2 (ja) | コーティングの光学的な層厚さを連続的に決定するための方法 | |
| JPS632087B2 (forum.php) | ||
| JP3120885B2 (ja) | 鏡面の測定装置 | |
| CN106969717B (zh) | 对称光桥式自稳激光测径系统的标定方法、测量方法 | |
| JPH06308025A (ja) | 光透過率測定装置の較正方法 | |
| JPS5483853A (en) | Measuring device | |
| CN209606695U (zh) | 一种反射面45度角精确调节装置 | |
| JP3340824B2 (ja) | 全反射プリズムを含む光学系 | |
| JPH07113547B2 (ja) | 試料面位置測定装置 | |
| JP2851053B2 (ja) | 光ビーム入射角検出センサ | |
| JPS60235027A (ja) | 狭波長帯域投受光装置 | |
| JP2001133232A (ja) | 被検物の傾き測定装置 | |
| JPH0530084Y2 (forum.php) | ||
| JP2808713B2 (ja) | 光学式微小変位測定装置 | |
| KR970003953Y1 (ko) | 반도체 노광장비의 포커싱 장치 | |
| KR100460705B1 (ko) | 레티클 상의 파티클 검출장치 | |
| JPH10158834A (ja) | 膜厚計測光学系および該光学系を備えた成膜装置 | |
| JP2826618B2 (ja) | 測距器の検査装置 | |
| JPH027035B2 (forum.php) | ||
| JPS59138916A (ja) | 距離測定装置 |