JPS63201921U - - Google Patents

Info

Publication number
JPS63201921U
JPS63201921U JP9381687U JP9381687U JPS63201921U JP S63201921 U JPS63201921 U JP S63201921U JP 9381687 U JP9381687 U JP 9381687U JP 9381687 U JP9381687 U JP 9381687U JP S63201921 U JPS63201921 U JP S63201921U
Authority
JP
Japan
Prior art keywords
intake passage
water tank
air outlet
super
insulating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9381687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429313Y2 (US20030157025A1-20030821-C00031.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987093816U priority Critical patent/JPH0429313Y2/ja
Publication of JPS63201921U publication Critical patent/JPS63201921U/ja
Application granted granted Critical
Publication of JPH0429313Y2 publication Critical patent/JPH0429313Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Air Humidification (AREA)
JP1987093816U 1987-06-18 1987-06-18 Expired JPH0429313Y2 (US20030157025A1-20030821-C00031.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987093816U JPH0429313Y2 (US20030157025A1-20030821-C00031.png) 1987-06-18 1987-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987093816U JPH0429313Y2 (US20030157025A1-20030821-C00031.png) 1987-06-18 1987-06-18

Publications (2)

Publication Number Publication Date
JPS63201921U true JPS63201921U (US20030157025A1-20030821-C00031.png) 1988-12-27
JPH0429313Y2 JPH0429313Y2 (US20030157025A1-20030821-C00031.png) 1992-07-16

Family

ID=30956718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987093816U Expired JPH0429313Y2 (US20030157025A1-20030821-C00031.png) 1987-06-18 1987-06-18

Country Status (1)

Country Link
JP (1) JPH0429313Y2 (US20030157025A1-20030821-C00031.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007178121A (ja) * 2007-03-30 2007-07-12 Matsushita Ecology Systems Co Ltd 気化式加湿機
CN103836740A (zh) * 2013-09-02 2014-06-04 张伦青 空调制冷方法及设备

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11447861B2 (en) 2016-12-15 2022-09-20 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus and a method of forming a patterned structure
US10770286B2 (en) 2017-05-08 2020-09-08 Asm Ip Holdings B.V. Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
US12040200B2 (en) 2017-06-20 2024-07-16 Asm Ip Holding B.V. Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus
US10923344B2 (en) 2017-10-30 2021-02-16 Asm Ip Holding B.V. Methods for forming a semiconductor structure and related semiconductor structures
TWI799494B (zh) 2018-01-19 2023-04-21 荷蘭商Asm 智慧財產控股公司 沈積方法
US11031242B2 (en) 2018-11-07 2021-06-08 Asm Ip Holding B.V. Methods for depositing a boron doped silicon germanium film
US12040199B2 (en) 2018-11-28 2024-07-16 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
USD975665S1 (en) 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
CN112309843A (zh) 2019-07-29 2021-02-02 Asm Ip私人控股有限公司 实现高掺杂剂掺入的选择性沉积方法
USD979506S1 (en) 2019-08-22 2023-02-28 Asm Ip Holding B.V. Insulator
KR20210024423A (ko) 2019-08-22 2021-03-05 에이에스엠 아이피 홀딩 비.브이. 홀을 구비한 구조체를 형성하기 위한 방법
KR20210054983A (ko) 2019-11-05 2021-05-14 에이에스엠 아이피 홀딩 비.브이. 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템
KR20210080214A (ko) 2019-12-19 2021-06-30 에이에스엠 아이피 홀딩 비.브이. 기판 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조
US12040177B2 (en) 2020-08-18 2024-07-16 Asm Ip Holding B.V. Methods for forming a laminate film by cyclical plasma-enhanced deposition processes

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5033537U (US20030157025A1-20030821-C00031.png) * 1973-07-19 1975-04-11
JPS60117039A (ja) * 1983-11-30 1985-06-24 Toshiba Corp 超音波加湿器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5033537U (US20030157025A1-20030821-C00031.png) * 1973-07-19 1975-04-11
JPS60117039A (ja) * 1983-11-30 1985-06-24 Toshiba Corp 超音波加湿器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007178121A (ja) * 2007-03-30 2007-07-12 Matsushita Ecology Systems Co Ltd 気化式加湿機
JP4545773B2 (ja) * 2007-03-30 2010-09-15 パナソニックエコシステムズ株式会社 気化式加湿機
CN103836740A (zh) * 2013-09-02 2014-06-04 张伦青 空调制冷方法及设备

Also Published As

Publication number Publication date
JPH0429313Y2 (US20030157025A1-20030821-C00031.png) 1992-07-16

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