JPS63201638U - - Google Patents

Info

Publication number
JPS63201638U
JPS63201638U JP9313787U JP9313787U JPS63201638U JP S63201638 U JPS63201638 U JP S63201638U JP 9313787 U JP9313787 U JP 9313787U JP 9313787 U JP9313787 U JP 9313787U JP S63201638 U JPS63201638 U JP S63201638U
Authority
JP
Japan
Prior art keywords
rotating shaft
attached
shaped opening
crushing
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9313787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9313787U priority Critical patent/JPS63201638U/ja
Publication of JPS63201638U publication Critical patent/JPS63201638U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crushing And Grinding (AREA)
JP9313787U 1987-06-17 1987-06-17 Pending JPS63201638U (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9313787U JPS63201638U (US06650917-20031118-M00005.png) 1987-06-17 1987-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9313787U JPS63201638U (US06650917-20031118-M00005.png) 1987-06-17 1987-06-17

Publications (1)

Publication Number Publication Date
JPS63201638U true JPS63201638U (US06650917-20031118-M00005.png) 1988-12-26

Family

ID=30955457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9313787U Pending JPS63201638U (US06650917-20031118-M00005.png) 1987-06-17 1987-06-17

Country Status (1)

Country Link
JP (1) JPS63201638U (US06650917-20031118-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010123027A1 (ja) * 2009-04-24 2010-10-28 東京エレクトロン株式会社 蒸着処理装置および蒸着処理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5415567A (en) * 1977-07-06 1979-02-05 Sumitomo Electric Ind Ltd Powder producing apparatus
JPS6144237B2 (US06650917-20031118-M00005.png) * 1982-03-03 1986-10-01 Kogyo Gijutsuin

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5415567A (en) * 1977-07-06 1979-02-05 Sumitomo Electric Ind Ltd Powder producing apparatus
JPS6144237B2 (US06650917-20031118-M00005.png) * 1982-03-03 1986-10-01 Kogyo Gijutsuin

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010123027A1 (ja) * 2009-04-24 2010-10-28 東京エレクトロン株式会社 蒸着処理装置および蒸着処理方法

Similar Documents

Publication Publication Date Title
JPS6411487U (US06650917-20031118-M00005.png)
JPH0213245U (US06650917-20031118-M00005.png)
JPS63201638U (US06650917-20031118-M00005.png)
JPS6439180U (US06650917-20031118-M00005.png)
JPH03120301U (US06650917-20031118-M00005.png)
JPS61102244U (US06650917-20031118-M00005.png)
JPH0358198U (US06650917-20031118-M00005.png)
JPS6258195U (US06650917-20031118-M00005.png)
JPS62198053U (US06650917-20031118-M00005.png)
JPH01114774U (US06650917-20031118-M00005.png)
JPH02108727U (US06650917-20031118-M00005.png)
JPS6330869U (US06650917-20031118-M00005.png)
JPS62152991U (US06650917-20031118-M00005.png)
JPS62106687U (US06650917-20031118-M00005.png)
JPS6451633U (US06650917-20031118-M00005.png)
JPS6281626U (US06650917-20031118-M00005.png)
JPS6344976U (US06650917-20031118-M00005.png)
JPS6366983U (US06650917-20031118-M00005.png)
JPS6198546U (US06650917-20031118-M00005.png)
JPH0214498U (US06650917-20031118-M00005.png)
JPS62150396U (US06650917-20031118-M00005.png)
JPS63176531U (US06650917-20031118-M00005.png)
JPH0233289U (US06650917-20031118-M00005.png)
JPS62181110U (US06650917-20031118-M00005.png)
JPS6358615U (US06650917-20031118-M00005.png)