JPS63200697U - - Google Patents

Info

Publication number
JPS63200697U
JPS63200697U JP9132787U JP9132787U JPS63200697U JP S63200697 U JPS63200697 U JP S63200697U JP 9132787 U JP9132787 U JP 9132787U JP 9132787 U JP9132787 U JP 9132787U JP S63200697 U JPS63200697 U JP S63200697U
Authority
JP
Japan
Prior art keywords
rotating shaft
screw type
screw
vacuum pump
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9132787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9132787U priority Critical patent/JPS63200697U/ja
Publication of JPS63200697U publication Critical patent/JPS63200697U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP9132787U 1987-06-16 1987-06-16 Pending JPS63200697U (US07922777-20110412-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9132787U JPS63200697U (US07922777-20110412-C00004.png) 1987-06-16 1987-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9132787U JPS63200697U (US07922777-20110412-C00004.png) 1987-06-16 1987-06-16

Publications (1)

Publication Number Publication Date
JPS63200697U true JPS63200697U (US07922777-20110412-C00004.png) 1988-12-23

Family

ID=30952011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9132787U Pending JPS63200697U (US07922777-20110412-C00004.png) 1987-06-16 1987-06-16

Country Status (1)

Country Link
JP (1) JPS63200697U (US07922777-20110412-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
JPS6223597A (ja) * 1985-07-24 1987-01-31 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
JPS6223597A (ja) * 1985-07-24 1987-01-31 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ

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