JPS63199161U - - Google Patents

Info

Publication number
JPS63199161U
JPS63199161U JP9103187U JP9103187U JPS63199161U JP S63199161 U JPS63199161 U JP S63199161U JP 9103187 U JP9103187 U JP 9103187U JP 9103187 U JP9103187 U JP 9103187U JP S63199161 U JPS63199161 U JP S63199161U
Authority
JP
Japan
Prior art keywords
target
magnetic ring
axial
radial direction
outer periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9103187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9103187U priority Critical patent/JPS63199161U/ja
Publication of JPS63199161U publication Critical patent/JPS63199161U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP9103187U 1987-06-12 1987-06-12 Pending JPS63199161U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9103187U JPS63199161U (US07655688-20100202-C00086.png) 1987-06-12 1987-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9103187U JPS63199161U (US07655688-20100202-C00086.png) 1987-06-12 1987-06-12

Publications (1)

Publication Number Publication Date
JPS63199161U true JPS63199161U (US07655688-20100202-C00086.png) 1988-12-21

Family

ID=30951440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9103187U Pending JPS63199161U (US07655688-20100202-C00086.png) 1987-06-12 1987-06-12

Country Status (1)

Country Link
JP (1) JPS63199161U (US07655688-20100202-C00086.png)

Similar Documents

Publication Publication Date Title
JPS63199161U (US07655688-20100202-C00086.png)
JPS62138942U (US07655688-20100202-C00086.png)
JPS6161340U (US07655688-20100202-C00086.png)
JPS63178686U (US07655688-20100202-C00086.png)
JPS64724U (US07655688-20100202-C00086.png)
JPH0162393U (US07655688-20100202-C00086.png)
JPS6280089U (US07655688-20100202-C00086.png)
JPS6299471U (US07655688-20100202-C00086.png)
JPS63160453U (US07655688-20100202-C00086.png)
JPS6185820U (US07655688-20100202-C00086.png)
JPH0344218U (US07655688-20100202-C00086.png)
JPS6445663U (US07655688-20100202-C00086.png)
JPH0432315U (US07655688-20100202-C00086.png)
JPS6235180U (US07655688-20100202-C00086.png)
JPH0266765U (US07655688-20100202-C00086.png)
JPS6435552U (US07655688-20100202-C00086.png)
JPS61157232U (US07655688-20100202-C00086.png)
JPS61159168U (US07655688-20100202-C00086.png)
JPH02121303U (US07655688-20100202-C00086.png)
JPH0349620U (US07655688-20100202-C00086.png)
JPH03130327U (US07655688-20100202-C00086.png)
JPS584391U (ja) 防護板を設置したグロ−ブポ−トの構造
JPS622573U (US07655688-20100202-C00086.png)
JPH0349437U (US07655688-20100202-C00086.png)
JPS6255732U (US07655688-20100202-C00086.png)