JPS63196941U - - Google Patents

Info

Publication number
JPS63196941U
JPS63196941U JP8991687U JP8991687U JPS63196941U JP S63196941 U JPS63196941 U JP S63196941U JP 8991687 U JP8991687 U JP 8991687U JP 8991687 U JP8991687 U JP 8991687U JP S63196941 U JPS63196941 U JP S63196941U
Authority
JP
Japan
Prior art keywords
chamber
handling
processing
utility
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8991687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8991687U priority Critical patent/JPS63196941U/ja
Publication of JPS63196941U publication Critical patent/JPS63196941U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Threshing Machine Elements (AREA)
JP8991687U 1987-06-11 1987-06-11 Pending JPS63196941U (US07642317-20100105-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8991687U JPS63196941U (US07642317-20100105-C00010.png) 1987-06-11 1987-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8991687U JPS63196941U (US07642317-20100105-C00010.png) 1987-06-11 1987-06-11

Publications (1)

Publication Number Publication Date
JPS63196941U true JPS63196941U (US07642317-20100105-C00010.png) 1988-12-19

Family

ID=30949329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8991687U Pending JPS63196941U (US07642317-20100105-C00010.png) 1987-06-11 1987-06-11

Country Status (1)

Country Link
JP (1) JPS63196941U (US07642317-20100105-C00010.png)

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