JPS63195736U - - Google Patents

Info

Publication number

JPS63195736U

JPS63195736U JP8769487U JP8769487U JPS63195736U JP S63195736 U JPS63195736 U JP S63195736U JP 8769487 U JP8769487 U JP 8769487U JP 8769487 U JP8769487 U JP 8769487U JP S63195736 U JPS63195736 U JP S63195736U

Authority

JP

Japan

Prior art keywords

shielding plate

wafer carrier

utility

scope

registration request

Prior art date

1987-06-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims description 9
• 238000005192 partition Methods 0.000 claims 1
• KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
• 239000002245 particle Substances 0.000 description 2
• 239000012050 conventional carrier Substances 0.000 description 1

Cited By (1)