JPS6319563U - - Google Patents

Info

Publication number
JPS6319563U
JPS6319563U JP10969286U JP10969286U JPS6319563U JP S6319563 U JPS6319563 U JP S6319563U JP 10969286 U JP10969286 U JP 10969286U JP 10969286 U JP10969286 U JP 10969286U JP S6319563 U JPS6319563 U JP S6319563U
Authority
JP
Japan
Prior art keywords
cooling medium
port
communicating
supply
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10969286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10969286U priority Critical patent/JPS6319563U/ja
Publication of JPS6319563U publication Critical patent/JPS6319563U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10969286U 1986-07-17 1986-07-17 Pending JPS6319563U (US07608600-20091027-C00054.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10969286U JPS6319563U (US07608600-20091027-C00054.png) 1986-07-17 1986-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10969286U JPS6319563U (US07608600-20091027-C00054.png) 1986-07-17 1986-07-17

Publications (1)

Publication Number Publication Date
JPS6319563U true JPS6319563U (US07608600-20091027-C00054.png) 1988-02-09

Family

ID=30988020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10969286U Pending JPS6319563U (US07608600-20091027-C00054.png) 1986-07-17 1986-07-17

Country Status (1)

Country Link
JP (1) JPS6319563U (US07608600-20091027-C00054.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176144U (US07608600-20091027-C00054.png) * 1984-10-25 1986-05-22

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176144U (US07608600-20091027-C00054.png) * 1984-10-25 1986-05-22
JPH0220441Y2 (US07608600-20091027-C00054.png) * 1984-10-25 1990-06-04

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