JPS63190U - - Google Patents

Info

Publication number
JPS63190U
JPS63190U JP9289686U JP9289686U JPS63190U JP S63190 U JPS63190 U JP S63190U JP 9289686 U JP9289686 U JP 9289686U JP 9289686 U JP9289686 U JP 9289686U JP S63190 U JPS63190 U JP S63190U
Authority
JP
Japan
Prior art keywords
pump device
cooler
turbo
molecular pump
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9289686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9289686U priority Critical patent/JPS63190U/ja
Publication of JPS63190U publication Critical patent/JPS63190U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP9289686U 1986-06-18 1986-06-18 Pending JPS63190U (US07652168-20100126-C00068.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9289686U JPS63190U (US07652168-20100126-C00068.png) 1986-06-18 1986-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9289686U JPS63190U (US07652168-20100126-C00068.png) 1986-06-18 1986-06-18

Publications (1)

Publication Number Publication Date
JPS63190U true JPS63190U (US07652168-20100126-C00068.png) 1988-01-05

Family

ID=30954994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9289686U Pending JPS63190U (US07652168-20100126-C00068.png) 1986-06-18 1986-06-18

Country Status (1)

Country Link
JP (1) JPS63190U (US07652168-20100126-C00068.png)

Similar Documents

Publication Publication Date Title
JPS63190U (US07652168-20100126-C00068.png)
JPS62197794U (US07652168-20100126-C00068.png)
JPS62197795U (US07652168-20100126-C00068.png)
JPS6361547U (US07652168-20100126-C00068.png)
JPS6249629U (US07652168-20100126-C00068.png)
JPH02114796U (US07652168-20100126-C00068.png)
JPH0158796U (US07652168-20100126-C00068.png)
JPH041694U (US07652168-20100126-C00068.png)
JPS6114798U (ja) 反転式軸流送風機
JPS63126590U (US07652168-20100126-C00068.png)
JPS61147301U (US07652168-20100126-C00068.png)
JPS6357395U (US07652168-20100126-C00068.png)
JPH0466395U (US07652168-20100126-C00068.png)
JPS62197793U (US07652168-20100126-C00068.png)
JPS61141966U (US07652168-20100126-C00068.png)
JPH0269093U (US07652168-20100126-C00068.png)
JPS63191U (US07652168-20100126-C00068.png)
JPH02112997U (US07652168-20100126-C00068.png)
JPS6374058U (US07652168-20100126-C00068.png)
JPS6336691U (US07652168-20100126-C00068.png)
JPS6158847U (US07652168-20100126-C00068.png)
JPS61171898U (US07652168-20100126-C00068.png)
JPH046270U (US07652168-20100126-C00068.png)
JPS61126752U (US07652168-20100126-C00068.png)
JPS61194151U (US07652168-20100126-C00068.png)