JPS63190584U - - Google Patents

Info

Publication number
JPS63190584U
JPS63190584U JP8134287U JP8134287U JPS63190584U JP S63190584 U JPS63190584 U JP S63190584U JP 8134287 U JP8134287 U JP 8134287U JP 8134287 U JP8134287 U JP 8134287U JP S63190584 U JPS63190584 U JP S63190584U
Authority
JP
Japan
Prior art keywords
chamber
temperature
low
gas
pressure gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8134287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8134287U priority Critical patent/JPS63190584U/ja
Publication of JPS63190584U publication Critical patent/JPS63190584U/ja
Pending legal-status Critical Current

Links

JP8134287U 1987-05-28 1987-05-28 Pending JPS63190584U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8134287U JPS63190584U (US07534539-20090519-C00280.png) 1987-05-28 1987-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8134287U JPS63190584U (US07534539-20090519-C00280.png) 1987-05-28 1987-05-28

Publications (1)

Publication Number Publication Date
JPS63190584U true JPS63190584U (US07534539-20090519-C00280.png) 1988-12-08

Family

ID=30932991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8134287U Pending JPS63190584U (US07534539-20090519-C00280.png) 1987-05-28 1987-05-28

Country Status (1)

Country Link
JP (1) JPS63190584U (US07534539-20090519-C00280.png)

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