JPS63188530U - - Google Patents

Info

Publication number

JPS63188530U

JPS63188530U JP8195887U JP8195887U JPS63188530U JP S63188530 U JPS63188530 U JP S63188530U JP 8195887 U JP8195887 U JP 8195887U JP 8195887 U JP8195887 U JP 8195887U JP S63188530 U JPS63188530 U JP S63188530U

Authority

JP

Japan

Prior art keywords

substrate

laser beam

intensity distribution

knife edge

measurement

Prior art date

1987-05-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005259 measurement Methods 0.000 claims description 6
• 239000000758 substrate Substances 0.000 claims 4
• 230000003287 optical effect Effects 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2