JPS63186555U - - Google Patents

Info

Publication number
JPS63186555U
JPS63186555U JP7800787U JP7800787U JPS63186555U JP S63186555 U JPS63186555 U JP S63186555U JP 7800787 U JP7800787 U JP 7800787U JP 7800787 U JP7800787 U JP 7800787U JP S63186555 U JPS63186555 U JP S63186555U
Authority
JP
Japan
Prior art keywords
brush roll
sprayers
cooling
cleaning water
sprayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7800787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7800787U priority Critical patent/JPS63186555U/ja
Publication of JPS63186555U publication Critical patent/JPS63186555U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Nozzles (AREA)
JP7800787U 1987-05-22 1987-05-22 Pending JPS63186555U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7800787U JPS63186555U (US07534539-20090519-C00280.png) 1987-05-22 1987-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7800787U JPS63186555U (US07534539-20090519-C00280.png) 1987-05-22 1987-05-22

Publications (1)

Publication Number Publication Date
JPS63186555U true JPS63186555U (US07534539-20090519-C00280.png) 1988-11-30

Family

ID=30926555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7800787U Pending JPS63186555U (US07534539-20090519-C00280.png) 1987-05-22 1987-05-22

Country Status (1)

Country Link
JP (1) JPS63186555U (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015205355A (ja) * 2014-04-17 2015-11-19 株式会社荏原製作所 冷却装置、及び、基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015205355A (ja) * 2014-04-17 2015-11-19 株式会社荏原製作所 冷却装置、及び、基板処理装置

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