JPS63185552U - - Google Patents

Info

Publication number
JPS63185552U
JPS63185552U JP7785187U JP7785187U JPS63185552U JP S63185552 U JPS63185552 U JP S63185552U JP 7785187 U JP7785187 U JP 7785187U JP 7785187 U JP7785187 U JP 7785187U JP S63185552 U JPS63185552 U JP S63185552U
Authority
JP
Japan
Prior art keywords
sets
electrodes
insulating substrate
interval
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7785187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7785187U priority Critical patent/JPS63185552U/ja
Publication of JPS63185552U publication Critical patent/JPS63185552U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP7785187U 1987-05-22 1987-05-22 Pending JPS63185552U (US07321065-20080122-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7785187U JPS63185552U (US07321065-20080122-C00160.png) 1987-05-22 1987-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7785187U JPS63185552U (US07321065-20080122-C00160.png) 1987-05-22 1987-05-22

Publications (1)

Publication Number Publication Date
JPS63185552U true JPS63185552U (US07321065-20080122-C00160.png) 1988-11-29

Family

ID=30926247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7785187U Pending JPS63185552U (US07321065-20080122-C00160.png) 1987-05-22 1987-05-22

Country Status (1)

Country Link
JP (1) JPS63185552U (US07321065-20080122-C00160.png)

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