JPS63185237U - - Google Patents

Info

Publication number
JPS63185237U
JPS63185237U JP7637387U JP7637387U JPS63185237U JP S63185237 U JPS63185237 U JP S63185237U JP 7637387 U JP7637387 U JP 7637387U JP 7637387 U JP7637387 U JP 7637387U JP S63185237 U JPS63185237 U JP S63185237U
Authority
JP
Japan
Prior art keywords
semiconductor substrates
storage cassette
side plates
substrates according
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7637387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7637387U priority Critical patent/JPS63185237U/ja
Publication of JPS63185237U publication Critical patent/JPS63185237U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP7637387U 1987-05-20 1987-05-20 Pending JPS63185237U (US07714131-20100511-C00038.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7637387U JPS63185237U (US07714131-20100511-C00038.png) 1987-05-20 1987-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7637387U JPS63185237U (US07714131-20100511-C00038.png) 1987-05-20 1987-05-20

Publications (1)

Publication Number Publication Date
JPS63185237U true JPS63185237U (US07714131-20100511-C00038.png) 1988-11-29

Family

ID=30923388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7637387U Pending JPS63185237U (US07714131-20100511-C00038.png) 1987-05-20 1987-05-20

Country Status (1)

Country Link
JP (1) JPS63185237U (US07714131-20100511-C00038.png)

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