JPS63184685U - - Google Patents

Info

Publication number
JPS63184685U
JPS63184685U JP1987072610U JP7261087U JPS63184685U JP S63184685 U JPS63184685 U JP S63184685U JP 1987072610 U JP1987072610 U JP 1987072610U JP 7261087 U JP7261087 U JP 7261087U JP S63184685 U JPS63184685 U JP S63184685U
Authority
JP
Japan
Prior art keywords
position detection
positioning device
detection arm
processing
focus positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987072610U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987072610U priority Critical patent/JPS63184685U/ja
Publication of JPS63184685U publication Critical patent/JPS63184685U/ja
Pending legal-status Critical Current

Links

JP1987072610U 1987-05-15 1987-05-15 Pending JPS63184685U (US20020125480A1-20020912-P00900.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987072610U JPS63184685U (US20020125480A1-20020912-P00900.png) 1987-05-15 1987-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987072610U JPS63184685U (US20020125480A1-20020912-P00900.png) 1987-05-15 1987-05-15

Publications (1)

Publication Number Publication Date
JPS63184685U true JPS63184685U (US20020125480A1-20020912-P00900.png) 1988-11-28

Family

ID=30916212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987072610U Pending JPS63184685U (US20020125480A1-20020912-P00900.png) 1987-05-15 1987-05-15

Country Status (1)

Country Link
JP (1) JPS63184685U (US20020125480A1-20020912-P00900.png)

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