JPS63181482U - - Google Patents
Info
- Publication number
- JPS63181482U JPS63181482U JP7006387U JP7006387U JPS63181482U JP S63181482 U JPS63181482 U JP S63181482U JP 7006387 U JP7006387 U JP 7006387U JP 7006387 U JP7006387 U JP 7006387U JP S63181482 U JPS63181482 U JP S63181482U
- Authority
- JP
- Japan
- Prior art keywords
- waste liquid
- liquid port
- protrusion
- port
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Description
第１図はこの考案の一実施例を示す断面図、第
２図は従来のスピンナ装置を示す断面図、第３図
は従来のスピンナ装置を示す廃液口とパイプの接
続部の断面図である。
図において７０は受け皿、８０は廃液口、９は
廃液タンク、１００はパイプである。なお、各図
中同一符号は同一又は相当部分を示す。
Fig. 1 is a cross-sectional view showing an embodiment of this invention, Fig. 2 is a cross-sectional view showing a conventional spinner device, and Fig. 3 is a cross-sectional view of the connection between the waste liquid port and the pipe showing the conventional spinner device. . In the figure, 70 is a saucer, 80 is a waste liquid port, 9 is a waste liquid tank, and 100 is a pipe. Note that the same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
、外周に突起を有する筒状の廃液口、この廃液口
から排出される薬液を収容する廃液タンク、上記
廃液口の突起に係合する凹部を有し、上記廃液口
と上記廃液タンクとを連通するパイプを備えたス
ピンナ装置。 A cylindrical waste liquid port provided at the lower part of the saucer for receiving the scattered chemical liquid and having a protrusion on the outer periphery, a waste liquid tank that accommodates the chemical liquid discharged from the waste liquid port, and a recess that engages with the protrusion of the waste liquid port. , a spinner device comprising a pipe that communicates the waste liquid port with the waste liquid tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7006387U JPS63181482U (en) | 1987-05-11 | 1987-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7006387U JPS63181482U (en) | 1987-05-11 | 1987-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63181482U true JPS63181482U (en) | 1988-11-22 |
Family
ID=30911354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7006387U Pending JPS63181482U (en) | 1987-05-11 | 1987-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63181482U (en) |
-
1987
- 1987-05-11 JP JP7006387U patent/JPS63181482U/ja active Pending