JPS63180932U - - Google Patents

Info

Publication number
JPS63180932U
JPS63180932U JP7210487U JP7210487U JPS63180932U JP S63180932 U JPS63180932 U JP S63180932U JP 7210487 U JP7210487 U JP 7210487U JP 7210487 U JP7210487 U JP 7210487U JP S63180932 U JPS63180932 U JP S63180932U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer container
inclusion
wafers
container according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7210487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7210487U priority Critical patent/JPS63180932U/ja
Publication of JPS63180932U publication Critical patent/JPS63180932U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP7210487U 1987-05-13 1987-05-13 Pending JPS63180932U (US20020051482A1-20020502-M00057.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7210487U JPS63180932U (US20020051482A1-20020502-M00057.png) 1987-05-13 1987-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7210487U JPS63180932U (US20020051482A1-20020502-M00057.png) 1987-05-13 1987-05-13

Publications (1)

Publication Number Publication Date
JPS63180932U true JPS63180932U (US20020051482A1-20020502-M00057.png) 1988-11-22

Family

ID=30915262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7210487U Pending JPS63180932U (US20020051482A1-20020502-M00057.png) 1987-05-13 1987-05-13

Country Status (1)

Country Link
JP (1) JPS63180932U (US20020051482A1-20020502-M00057.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005112106A1 (ja) * 2004-05-19 2005-11-24 Nippon Mining & Metals Co., Ltd. ウェハ保管容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005112106A1 (ja) * 2004-05-19 2005-11-24 Nippon Mining & Metals Co., Ltd. ウェハ保管容器
US7510082B2 (en) 2004-05-19 2009-03-31 Nippon Mining & Metals Co., Ltd. Wafer storage container

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