JPS6317764U - - Google Patents

Info

Publication number

JPS6317764U

JPS6317764U JP10979486U JP10979486U JPS6317764U JP S6317764 U JPS6317764 U JP S6317764U JP 10979486 U JP10979486 U JP 10979486U JP 10979486 U JP10979486 U JP 10979486U JP S6317764 U JPS6317764 U JP S6317764U

Authority

JP

Japan

Prior art keywords

polishing

holder body

nozzle

view

sectional

Prior art date

1986-07-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005498 polishing Methods 0.000 claims description 6
• 230000037431 insertion Effects 0.000 claims description 2
• 238000003780 insertion Methods 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 2
• 239000003082 abrasive agent Substances 0.000 description 1

Cited By (1)