JPS63175835U - - Google Patents
Info
- Publication number
- JPS63175835U JPS63175835U JP2867687U JP2867687U JPS63175835U JP S63175835 U JPS63175835 U JP S63175835U JP 2867687 U JP2867687 U JP 2867687U JP 2867687 U JP2867687 U JP 2867687U JP S63175835 U JPS63175835 U JP S63175835U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- chamber
- check
- pressurizing
- pressurization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 230000007547 defect Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2867687U JPS63175835U (de) | 1987-02-26 | 1987-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2867687U JPS63175835U (de) | 1987-02-26 | 1987-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63175835U true JPS63175835U (de) | 1988-11-15 |
Family
ID=30831867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2867687U Pending JPS63175835U (de) | 1987-02-26 | 1987-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63175835U (de) |
-
1987
- 1987-02-26 JP JP2867687U patent/JPS63175835U/ja active Pending
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