JPS63174600U - - Google Patents

Info

Publication number

JPS63174600U

JPS63174600U JP6222587U JP6222587U JPS63174600U JP S63174600 U JPS63174600 U JP S63174600U JP 6222587 U JP6222587 U JP 6222587U JP 6222587 U JP6222587 U JP 6222587U JP S63174600 U JPS63174600 U JP S63174600U

Authority

JP

Japan

Prior art keywords

pipe section

exhaust pipe

diffusion pump

oil diffusion

exhaust

Prior art date

1987-04-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009792 diffusion process Methods 0.000 claims description 4
• 238000001816 cooling Methods 0.000 claims description 2
• 239000003921 oil Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 239000010720 hydraulic oil Substances 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1