JPS63173351U - - Google Patents

Info

Publication number
JPS63173351U
JPS63173351U JP6543487U JP6543487U JPS63173351U JP S63173351 U JPS63173351 U JP S63173351U JP 6543487 U JP6543487 U JP 6543487U JP 6543487 U JP6543487 U JP 6543487U JP S63173351 U JPS63173351 U JP S63173351U
Authority
JP
Japan
Prior art keywords
vacuum
rotating body
chamber
rotating
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6543487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6543487U priority Critical patent/JPS63173351U/ja
Publication of JPS63173351U publication Critical patent/JPS63173351U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Centrifugal Separators (AREA)
JP6543487U 1987-04-30 1987-04-30 Pending JPS63173351U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6543487U JPS63173351U (US07709020-20100504-C00041.png) 1987-04-30 1987-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6543487U JPS63173351U (US07709020-20100504-C00041.png) 1987-04-30 1987-04-30

Publications (1)

Publication Number Publication Date
JPS63173351U true JPS63173351U (US07709020-20100504-C00041.png) 1988-11-10

Family

ID=30902502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6543487U Pending JPS63173351U (US07709020-20100504-C00041.png) 1987-04-30 1987-04-30

Country Status (1)

Country Link
JP (1) JPS63173351U (US07709020-20100504-C00041.png)

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