JPS63172156U - - Google Patents

Info

Publication number

JPS63172156U

JPS63172156U JP6593887U JP6593887U JPS63172156U JP S63172156 U JPS63172156 U JP S63172156U JP 6593887 U JP6593887 U JP 6593887U JP 6593887 U JP6593887 U JP 6593887U JP S63172156 U JPS63172156 U JP S63172156U

Authority

JP

Japan

Prior art keywords

specific region

semiconductor substrate

semiconductor

multilayer film

concentration

Prior art date

1987-04-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 14
• 239000000758 substrate Substances 0.000 claims description 6
• 230000031700 light absorption Effects 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 2
• 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1