JPS63170459U - - Google Patents

Info

Publication number
JPS63170459U
JPS63170459U JP6149187U JP6149187U JPS63170459U JP S63170459 U JPS63170459 U JP S63170459U JP 6149187 U JP6149187 U JP 6149187U JP 6149187 U JP6149187 U JP 6149187U JP S63170459 U JPS63170459 U JP S63170459U
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
sputtering apparatus
processed
holds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6149187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6149187U priority Critical patent/JPS63170459U/ja
Publication of JPS63170459U publication Critical patent/JPS63170459U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6149187U 1987-04-24 1987-04-24 Pending JPS63170459U (US07413550-20080819-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6149187U JPS63170459U (US07413550-20080819-C00001.png) 1987-04-24 1987-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6149187U JPS63170459U (US07413550-20080819-C00001.png) 1987-04-24 1987-04-24

Publications (1)

Publication Number Publication Date
JPS63170459U true JPS63170459U (US07413550-20080819-C00001.png) 1988-11-07

Family

ID=30894880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6149187U Pending JPS63170459U (US07413550-20080819-C00001.png) 1987-04-24 1987-04-24

Country Status (1)

Country Link
JP (1) JPS63170459U (US07413550-20080819-C00001.png)

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