JPS63167414U - - Google Patents
Info
- Publication number
- JPS63167414U JPS63167414U JP5995387U JP5995387U JPS63167414U JP S63167414 U JPS63167414 U JP S63167414U JP 5995387 U JP5995387 U JP 5995387U JP 5995387 U JP5995387 U JP 5995387U JP S63167414 U JPS63167414 U JP S63167414U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- wafers
- stores
- stacked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5995387U JPS63167414U (https=) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5995387U JPS63167414U (https=) | 1987-04-22 | 1987-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63167414U true JPS63167414U (https=) | 1988-11-01 |
Family
ID=30891937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5995387U Pending JPS63167414U (https=) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63167414U (https=) |
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1987
- 1987-04-22 JP JP5995387U patent/JPS63167414U/ja active Pending