JPS631658A - 基板送り装置 - Google Patents
基板送り装置Info
- Publication number
- JPS631658A JPS631658A JP61143373A JP14337386A JPS631658A JP S631658 A JPS631658 A JP S631658A JP 61143373 A JP61143373 A JP 61143373A JP 14337386 A JP14337386 A JP 14337386A JP S631658 A JPS631658 A JP S631658A
- Authority
- JP
- Japan
- Prior art keywords
- arm
- slider
- pulley
- wire
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 18
- 230000032258 transport Effects 0.000 claims description 10
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Supply And Installment Of Electrical Components (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61143373A JPS631658A (ja) | 1986-06-19 | 1986-06-19 | 基板送り装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61143373A JPS631658A (ja) | 1986-06-19 | 1986-06-19 | 基板送り装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS631658A true JPS631658A (ja) | 1988-01-06 |
| JPH0378342B2 JPH0378342B2 (enEXAMPLES) | 1991-12-13 |
Family
ID=15337276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61143373A Granted JPS631658A (ja) | 1986-06-19 | 1986-06-19 | 基板送り装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631658A (enEXAMPLES) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0210336U (enEXAMPLES) * | 1988-07-05 | 1990-01-23 |
-
1986
- 1986-06-19 JP JP61143373A patent/JPS631658A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0210336U (enEXAMPLES) * | 1988-07-05 | 1990-01-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0378342B2 (enEXAMPLES) | 1991-12-13 |
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