JPS63165843U - - Google Patents

Info

Publication number
JPS63165843U
JPS63165843U JP5877687U JP5877687U JPS63165843U JP S63165843 U JPS63165843 U JP S63165843U JP 5877687 U JP5877687 U JP 5877687U JP 5877687 U JP5877687 U JP 5877687U JP S63165843 U JPS63165843 U JP S63165843U
Authority
JP
Japan
Prior art keywords
core tube
furnace core
exhaust pipe
suction pipe
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5877687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5877687U priority Critical patent/JPS63165843U/ja
Publication of JPS63165843U publication Critical patent/JPS63165843U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5877687U 1987-04-20 1987-04-20 Pending JPS63165843U (US20020128544A1-20020912-P00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5877687U JPS63165843U (US20020128544A1-20020912-P00008.png) 1987-04-20 1987-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5877687U JPS63165843U (US20020128544A1-20020912-P00008.png) 1987-04-20 1987-04-20

Publications (1)

Publication Number Publication Date
JPS63165843U true JPS63165843U (US20020128544A1-20020912-P00008.png) 1988-10-28

Family

ID=30889650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5877687U Pending JPS63165843U (US20020128544A1-20020912-P00008.png) 1987-04-20 1987-04-20

Country Status (1)

Country Link
JP (1) JPS63165843U (US20020128544A1-20020912-P00008.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04133430U (ja) * 1991-03-22 1992-12-11 国際電気株式会社 半導体製造装置のガス管接続装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04133430U (ja) * 1991-03-22 1992-12-11 国際電気株式会社 半導体製造装置のガス管接続装置

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