JPS63164605U - - Google Patents

Info

Publication number
JPS63164605U
JPS63164605U JP5726887U JP5726887U JPS63164605U JP S63164605 U JPS63164605 U JP S63164605U JP 5726887 U JP5726887 U JP 5726887U JP 5726887 U JP5726887 U JP 5726887U JP S63164605 U JPS63164605 U JP S63164605U
Authority
JP
Japan
Prior art keywords
switching section
flow port
pilot chamber
port side
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5726887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5726887U priority Critical patent/JPS63164605U/ja
Publication of JPS63164605U publication Critical patent/JPS63164605U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
JP5726887U 1987-04-15 1987-04-15 Pending JPS63164605U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5726887U JPS63164605U (US06826419-20041130-M00005.png) 1987-04-15 1987-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5726887U JPS63164605U (US06826419-20041130-M00005.png) 1987-04-15 1987-04-15

Publications (1)

Publication Number Publication Date
JPS63164605U true JPS63164605U (US06826419-20041130-M00005.png) 1988-10-26

Family

ID=30886823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5726887U Pending JPS63164605U (US06826419-20041130-M00005.png) 1987-04-15 1987-04-15

Country Status (1)

Country Link
JP (1) JPS63164605U (US06826419-20041130-M00005.png)

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