JPS6316447U - - Google Patents

Info

Publication number

JPS6316447U

JPS6316447U JP11081786U JP11081786U JPS6316447U JP S6316447 U JPS6316447 U JP S6316447U JP 11081786 U JP11081786 U JP 11081786U JP 11081786 U JP11081786 U JP 11081786U JP S6316447 U JPS6316447 U JP S6316447U

Authority

JP

Japan

Prior art keywords

semiconductor wafer

orientation

rolling contact

flat surface

flat

Prior art date

1986-07-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 8
• 238000005096 rolling process Methods 0.000 claims description 6
• 230000002093 peripheral effect Effects 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 2